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Fixture three-dimensional motion control device

A three-dimensional motion and control device technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, can solve problems such as difficulty in realization, and achieve the effects of strong operability, convenient loading and unloading, and flexible use

Inactive Publication Date: 2005-02-16
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The films prepared by this coating machine are basically isotropic, but for the preparation of anisotropic or optically active films, this fixture device is difficult to achieve

Method used

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  • Fixture three-dimensional motion control device
  • Fixture three-dimensional motion control device
  • Fixture three-dimensional motion control device

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] see first figure 1 , figure 1 It is a connection schematic diagram of the clamp three-dimensional motion control device of the present invention. As can be seen from the figure, the present invention is that the computer 1 controls the rotation of two stepper motors 51, 52 through the stepper motor driver 2. The stepper motors 51, 52 and their The support bracket is placed in the vacuum chamber 4 of the coating machine, and the control signal of the computer 1 is input from the outside of the vacuum chamber 4 through the cable 3, and the control of the computer 1 does not affect the vacuum degree in the coating machine.

[0019] The connection mode of each part of device of the present invention is as follows:

[0020] A control device for three-dimensional movement of a fixture, which is composed of a computer 1, a driver 2, two stepper motors 51, 52 and a support bracket. The support bracket is fixed in the vacuum chamber 4 of a coating machine, and the support brack...

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PUM

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Abstract

A kind of controlling equipment of clamp's three-dimensional movement for physical vaporous deposition film plating. It is composed of computer, drive, two stepper motors and brackets. The brackets are fixed in film-plating machine's vacuum room. This brackets fix the first stepper motor. Fix a right-angle armor plate on the rotated axes of this first stepper motor. The rotated axes of the second stepper motor drill through another armor plate of this right-angle armor plate and is fixed up outside of the cover armor plate. The rotated axes of the stepper motor is fixed up with a clamp and fit a substrate on this clamp. The computer is connected with the drive and this drive is connected separately with the first and the second stepper motor through cables. This invention expands the film-plating clamp's movement from two-dimensional to three-dimensional and this is good to the controlling of film plating.

Description

technical field [0001] The invention relates to a physical vapor deposition coating machine, in particular to a control device for three-dimensional movement of a fixture of a physical vapor deposition coating machine. Background technique [0002] Thin film materials have been widely used in modern science and technology. A large number of workers have devoted themselves to the research and development of thin films, but to develop a thin film with specific properties, whether it is an optical thin film or a functional thin film, a lot of exploratory work must be done. Vacuum coating technology is currently one of the main ways to prepare thin films with various properties, such as physical vapor deposition (PVD) method. The fixtures generally used in the preparation of thin films by PVD method are placed horizontally. During the evaporation process, the fixtures are driven by a motor to rotate at high speed in the horizontal plane. This fixture is suitable for coating op...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/22
Inventor 王建国邵建达郑韦军范正修
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI