Motion control and vibration control experimental system for flexible cantilever beam in noninertial system

Abstract

It is a non-inertial frame flexible cantilever beam movement control and vibration control test system, wherein, its aluminium beam is attached with piezo-sensor and piezo-actuator which are fixed on the high-speed rotation test bench though clamper. The analog output end of DSP control card is connected with analog input end of high-pressure power amplifier. The voltage output of high-pressure power amplifier is connected with electrode of piezo-actuator. The piezo-sensor electrode is connected with the analog input end of DSP control card through signal adjusting amplifier. The coder of motor driver is connected with the high-speed rotation test bench. The DSP control card and motor movement control card are plugged in the IO extension tank of computer.

Description

technical field [0001] The invention relates to a motion control and vibration control experiment system, in particular to a motion control and vibration control experiment system of a flexible cantilever beam in a non-inertial system, which is used in the field of mechanical engineering. Background technique [0002] In the process of developing the prototype system of the key technical unit of IC post-packaging equipment, the mechanical model of the rotating flexible cantilever beam was abstracted. Due to the specific characteristics of the IC industry, the positioning accuracy of the rotating flexible beam is required to be less than 5 μm, and it is required to rotate at high speed and high speed. Vibration active control is implemented under acceleration start-stop conditions. [0003] The motion control and vibration control experimental system based on high-speed and high-acceleration rotating flexible cantilever beams can reveal new mechanical phenomena of key technol...

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Problems solved by technology

However, this experimental device cannot meet the requirements of the current theoretical research on the motion control and vibration control of the rotating flexible cantilever beam: there is no actuating device on the flexible beam, and the active control of vibration cannot be realized; the rotational motion of the star part of the air bearing platform is not affected The control of the feedback channel cannot realize the motion control and precise positioning of the flexible beam; the whole system works under low-speed conditions, and cannot be applied to the experimental research of high-speed, high-acceleration rotating flexible beams

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