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Bulk silicon mirrors with hinges underneath

A hinge, single crystal silicon technology, applied in the photoengraving process of the pattern surface, the microstructure device composed of deformable elements, the instrument, etc., can solve the problems of lack of overall structure and difficult alignment, and achieve high performance Powerful, wide-ranging effects

Active Publication Date: 2005-09-21
CAPELLA PHOTONICS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Besides the mirrors made of polysilicon (or thin film), another drawback of the resulting array of mirrors is the lack of a monolithic structure, which makes said arrays not easy to align and susceptible to other extraneous unwanted influences

Method used

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  • Bulk silicon mirrors with hinges underneath
  • Bulk silicon mirrors with hinges underneath
  • Bulk silicon mirrors with hinges underneath

Examples

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Embodiment Construction

[0022] Figures 1A-1B A first embodiment of a MEMS device according to the invention is shown. Figure 1A A schematic side sectional view of MEMS device 100 is shown, which includes body element 110 ; first and second hinge elements 121 , 122 ; and support 130 . Bulk element 110 may have a "device" (or "top") surface 112 , and a "bottom" surface 111 positioned below and opposite device surface 112 . Each of the first and second hinge elements 121 , 122 is disposed below the device surface 112 . as Figure 1A In the implementation of the embodiment, the hinge elements 121 , 122 are each connected at one end to the bottom surface 111 of the body element 110 and at the other end to the support 130 . In this way, the body element 110 is suspended by the hinge elements 121 , 122 arranged entirely below the component surface 112 .

[0023] Figure 1B A schematic top view of the MEMS device 100 is shown. By way of example, it is shown that the device surface 112 of the bulk eleme...

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Abstract

A MEMS device (100), includes a body component (110), a first and a second hinges (121,122) and a supporting piece (130). The body component (110) is provided with a top surface and a bottom surface (112,111), and the hinge is provide below the top surface (112).

Description

[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Provisional Patent Application No. 60 / 295,682, filed June 2, 2001, and U.S. Patent Application No. 10 / 159,153, filed May 31, 2002, both of which are hereby incorporated by reference was incorporated into this article. technical field [0003] The present invention generally relates to microelectromechanical systems (MEMS). In particular, the present invention provides methods and systems for fabricating MEMS mirrors by combining volume and surface micromachining techniques. Background technique [0004] MEMS mirrors have proven effective in a variety of applications, including high-speed scanning and optical switching. In this application, it is necessary for the MEMS mirror to have a flat optical surface, a large rotation range, and durable performance. [0005] Many applications (eg, optical networking applications) also require MEMS mirrors to be configured in tightly pack...

Claims

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Application Information

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IPC IPC(8): B81B3/00B81C3/00G02B26/08
CPCG02B26/0841
Inventor B·P·范德里恩惠岑J·P·维尔德N·宽
Owner CAPELLA PHOTONICS INC
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