Bulk silicon mirrors with hinges underneath
A hinge, single crystal silicon technology, applied in the photoengraving process of the pattern surface, the microstructure device composed of deformable elements, the instrument, etc., can solve the problems of lack of overall structure and difficult alignment, and achieve high performance Powerful, wide-ranging effects
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 Figure 1A-1B The first embodiment of the MEMS device according to the present invention is shown. Figure 1A A schematic side sectional view of the MEMS device 100 is shown, which includes a body element 110; first and second hinge elements 121, 122; and a support 130. The body element 110 may have a “device” (or “top”) surface 112 and a “bottom” surface 111 located below and opposite to the device surface 112. The first and second hinge elements 121, 122 are each arranged below the device surface 112. As Figure 1A In the implementation of the embodiment, the hinge elements 121, 122 are each connected to the bottom surface 111 of the body element 110 at one end, and connected to the support 130 at the other end. In this way, the body element 110 is suspended by the hinge elements 121, 122 arranged entirely under the surface 112 of the device.
 Figure 1B A schematic top view of the MEMS device 100 is shown. With this example, it is shown that the device surface ...
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