Bulk silicon mirrors with hinges underneath

A hinge, single crystal silicon technology, applied in the photoengraving process of the pattern surface, the microstructure device composed of deformable elements, the instrument, etc., can solve the problems of lack of overall structure and difficult alignment, and achieve high performance Powerful, wide-ranging effects

Active Publication Date: 2005-09-21
CAPELLA PHOTONICS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Besides the mirrors made of polysilicon (or thin film), another drawback of the resulting array of mirrors is the lack of

Method used

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  • Bulk silicon mirrors with hinges underneath
  • Bulk silicon mirrors with hinges underneath
  • Bulk silicon mirrors with hinges underneath

Examples

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Example Embodiment

[0022] Figure 1A-1B The first embodiment of the MEMS device according to the present invention is shown. Figure 1A A schematic side sectional view of the MEMS device 100 is shown, which includes a body element 110; first and second hinge elements 121, 122; and a support 130. The body element 110 may have a “device” (or “top”) surface 112 and a “bottom” surface 111 located below and opposite to the device surface 112. The first and second hinge elements 121, 122 are each arranged below the device surface 112. As Figure 1A In the implementation of the embodiment, the hinge elements 121, 122 are each connected to the bottom surface 111 of the body element 110 at one end, and connected to the support 130 at the other end. In this way, the body element 110 is suspended by the hinge elements 121, 122 arranged entirely under the surface 112 of the device.

[0023] Figure 1B A schematic top view of the MEMS device 100 is shown. With this example, it is shown that the device surface ...

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Abstract

A MEMS device (100), includes a body component (110), a first and a second hinges (121,122) and a supporting piece (130). The body component (110) is provided with a top surface and a bottom surface (112,111), and the hinge is provide below the top surface (112).

Description

[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Provisional Patent Application No. 60 / 295,682, filed June 2, 2001, and U.S. Patent Application No. 10 / 159,153, filed May 31, 2002, both of which are hereby incorporated by reference was incorporated into this article. technical field [0003] The present invention generally relates to microelectromechanical systems (MEMS). In particular, the present invention provides methods and systems for fabricating MEMS mirrors by combining volume and surface micromachining techniques. Background technique [0004] MEMS mirrors have proven effective in a variety of applications, including high-speed scanning and optical switching. In this application, it is necessary for the MEMS mirror to have a flat optical surface, a large rotation range, and durable performance. [0005] Many applications (eg, optical networking applications) also require MEMS mirrors to be configured in tightly pack...

Claims

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Application Information

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IPC IPC(8): B81B3/00B81C3/00G02B26/08
CPCG02B26/0841
Inventor B·P·范德里恩惠岑J·P·维尔德N·宽
Owner CAPELLA PHOTONICS INC
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