Contact probe, method of manufacturing the contact probe, and device and method for inspection

A technology for inspection devices and probes, applied to measuring devices, instruments, measuring electronics, etc., can solve problems such as increased contact area
CN1693903AInactive Publication Date: 2005-11-09SUMITOMO ELECTRIC IND LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SUMITOMO ELECTRIC IND LTD
Publication Date
2005-11-09
Estimated Expiration
Not applicable · inactive patent

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Abstract

A method of manufacturing a contact probe includes an electroforming step of, using a resist film (522) arranged on a substrate (521) as a pattern frame having a shape corresponding to a contact probe, performing electroforming to fill a gap in the resist film (522) to form a metal layer (526), a tip end shaping step of obliquely removing and sharpening that part of the metal layer (526) which serves as a tip end portion of the contact probe, and a take-out step of taking out only the metal layer (526) from the pattern frame.
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Description

[0001] This application is a divisional application of the invention patent application filed by Sumitomo Electric Industries Co., Ltd. on January 22, 2002, entitled "Contact Probe and Its Manufacturing Method, Inspection Device, and Inspection Method" and application number 02804024.4. technical field

[0002] The present invention relates to a contact probe used in an inspection device for electrically inspecting a circuit to be inspected such as a semiconductor substrate or a liquid crystal display, and a method for manufacturing the same. It also relates to an inspection device and an inspection method used in the inspection. Background technique

[0003] Inspection of a circuit formed by a semiconductor substrate or a liquid crystal display is generally performed using an inspection device having an electrode portion (called a probe card, etc.) in which a plurality of scales are arranged based on a circuit pattern to be inspected. As the contact head (or contact pin) of...

Claims

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