Defects detection method and apparatus for optical components

Abstract

The invention discloses a defect detection method and a defect detection device of an optical component, wherein the judging part (13) makes the dimension L1 of the lamination direction of the incident area (19) larger than the thickness L2 of the light guide layer (22) of the optical component (14) way of incidence. The detection light (18) can enter the light guide layer (22) even if the positioning accuracy of the incident position of the detection light (18) is low. The judging unit (13) makes the detection light (18) incident so as to be smaller than the dimension L3 of the lamination direction of the optical member (14). The detection light (18) can be prevented from being scattered by scattering factors such as dust and scratches on both end faces of the optical member (14) in the stacking direction Z. Therefore, the defect (25) of the optical component (14) can be detected with high precision by detecting the light emitted from the optical component (14).

Description

field of invention [0001] The present invention relates to an optical component defect inspection method and a defect inspection device for detecting defects in an optical component formed by laminating a plurality of transmissive layers. Background technique [0002] Figure 24 It is a perspective view showing a defect inspection device 1 for a transparent substrate according to the first prior art. Japanese Patent Publication No. H11-190700 describes the first prior art. Laser 2 emits laser light 2 a toward mirror 3 . Mirror 3 directs laser light 2 a from laser 2 to converging lens 4 . Converging lens 4 directs the laser light from mirror 3 to transparent substrate 5 . The light incident on the transparent substrate is repeatedly reflected on both end surfaces in the thickness direction of the transparent substrate 5 . When the transparent substrate 5 has a defect, the defect causes light to scatter, and the scattered light is emitted to the outside of the transparent ...

AI Technical Summary

Problems solved by technology

Therefore, light is emitted from the protective sheet even when there is no defect, so it is not possible to clearly distinguish the state of light emission when there is a defect and when there is no defect, and it is not possible to detect defects of the multilayer polarizing element with high accuracy.

In the multilayer polarizing element, a plurality of materials with different refractive indices are also laminated, so when light is incident as in the first prior art, as described above, the scattering of light is large, and the accuracy of defect detection is reduced.

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