Monolithic sheet style quartz crystal frequency device and production thereof
A frequency device and quartz crystal technology, which is applied to the monolithic chip quartz crystal frequency device and its manufacturing field, can solve the problems of poor air tightness, large product size, and high manufacturing cost, and achieve high efficiency, low cost, and low cost. Good bonding effect
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[0023] figure 1 , 2 Schematic diagrams of two different cross-sectional structures of the monolithic plate quartz crystal frequency device manufactured for the present invention. As can be seen from the figure, the quartz wafer 3 is hidden in a cavity (vibration cavity) composed of an upper cover pit 4 and a lower cover pit 5 . Firstly, according to the different size requirements of the pit 4 of the upper cover plate and the pit 5 of the lower cover plate, prefabricate two pieces of ceramics with an m×n array (wherein, m≥1, n≥1,) by a special method cover plate.
[0024] image 3 It is a schematic diagram of the lower cover plate with the wafer attached to the intermediate splint, Figure 4 It is a side view sectional view of the lower cover plate with the wafer attached to the intermediate splint, Figure 5 It is a schematic diagram of the lower cover plate with the wafer attached, Figure 6 It is a side view sectional view of the lower cover plate with the wafer attac...
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