Apparatus and method for base plate conglutination
A technology for bonding devices and substrates, which can be used in optics, instruments, electrical components, etc., and can solve problems such as poor contact
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[0036] Refer to the following Figure 4 to Figure 9 An embodiment of the substrate bonding method and the substrate bonding apparatus of the present invention will be described in detail. Also, in Figure 4 to Figure 11 in, for with Figure 1 to Figure 3 The structures that are the same as the conventional structures shown are assigned the same symbols, and detailed description thereof will be omitted.
[0037] Figure 4 It is a configuration diagram showing the first embodiment of the substrate bonding apparatus of the present invention.
[0038] exist Figure 4 Among them, the substrates 1a, 1b made of thin glass constituting a pair of upper and lower rectangular shapes are in the chamber 2 composed of the upper and lower chambers 2a, 2b, and the upper substrate 1a is held on the lower surface of the upper chuck 3a by suction, etc. 1b is placed and held on top of the lower suction cup 3b.
[0039] The display surface of the lower substrate 1b is provided with a spacer ...
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