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Method and apparatus for forming surface shape, method and apparatus for forming flying surface shape of magnetic head

A flying surface, magnetic head technology, used in the manufacture of magnetic head surface, magnetic recording head, magnetic recording and other directions

Inactive Publication Date: 2011-05-11
SAE MAGNETICS (HK) LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Furthermore, it is necessary to prepare a plurality of reticle lines (masks) with predetermined patterns, thus increasing the manufacturing cost
In addition, in the exposure process, when the protective layer is thicker than the depth of focus of the imaging surface, a sharp end surface of the protective layer cannot be formed after development, and a steep wall angle of the concave-convex portion by etching cannot be formed.
Thus, it is difficult for such a head slider to maintain a stable flying height

Method used

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  • Method and apparatus for forming surface shape, method and apparatus for forming flying surface shape of magnetic head
  • Method and apparatus for forming surface shape, method and apparatus for forming flying surface shape of magnetic head
  • Method and apparatus for forming surface shape, method and apparatus for forming flying surface shape of magnetic head

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Embodiment 1

[0041] The first embodiment of the present invention is as Figure 1 to Figure 5 shown. figure 1 It is a block diagram showing the structure of the magnetic head flying surface forming device. figure 2 It is a functional block diagram showing the structure of the control device. Figure 3 to Figure 4 It is an explanatory diagram showing the state when the flying surface of the magnetic head is formed. Figure 5 It is a flow chart of the operation of the surface shape forming device.

[0042] [composition]

[0043] combine figure 1 As shown, the structure of the magnetic head flying surface forming device (surface shape forming device) of the present invention will be described. The flying surface forming device includes: a protective layer coating device (protective layer attaching device (protective layer forming device), not shown) for applying a protective layer material to the magnetic head 1; a laser beam for irradiating the attached protective layer material with...

Embodiment 2

[0077] Next, combine Figure 6 to Figure 9 A second embodiment of the present invention will be described. Figure 6 It is a block diagram showing the structure of the magnetic head flying surface forming apparatus. Figure 7 to Figure 8 It is an explanatory diagram showing the state when the flying surface of the magnetic head is formed. Figure 9 It is the flow chart of the operation of the flight surface forming device.

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Abstract

The invention provides a surface shape forming apparatus, comprising: a resist forming means for forming the resist of a prescribed shape to a prescribed surface of an etching object (1), and an etching means for subjecting the prescribed surface of the etching object (1) in which the resist is formed to etching processing, wherein the resist forming means is equipped with a resist sticking means for sticking a resist material to the prescribed surface of the etching object (1), and a laser irradiation means (2) for irradiating the stuck resist material with a laser beam which moves according to a command of a controller to remove a part of the resist material, so as to form the material to the prescribed shape. The surface shape forming apparatus can form the surface shape of the etching object in a short period of time at a low cost and realize high accuracy of the surface shape to be formed.

Description

technical field [0001] The invention relates to a method and device for forming a surface shape, in particular to a method and a device for forming a protective layer and forming a surface shape by etching. Background technique [0002] A magnetic disk drive device (HDD) includes a magnetic head in which a magnetic head element portion for reading and writing data to a magnetic disk is formed. Moreover, in the current magnetic disk drive device, with the high density of recorded data, the magnetic head is required to be as close as possible to the surface of the magnetic disk, that is, the requirement for low floating of the magnetic head is getting higher and higher. [0003] In order to achieve low floating, unevenness of a predetermined shape is formed on the flying surface of the magnetic head by using the air flow flowing in when the magnetic disk rotates to generate appropriate heavy pressure. Moreover, in recent years, the shape of the flying surface has become more ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G11B5/60G11B5/127
CPCG11B5/102G11B5/187G11B5/6005G11B5/6082
Inventor 伊藤善映中田刚上田国博
Owner SAE MAGNETICS (HK) LTD
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