Semiconductor device and inspection method of the same and electromagnetic detection equipment

Abstract

A semiconductor integrated circuit and its inspection method, and an electromagnetic detection equipment, the semiconductor integrated circuit including, without setting an extra external test terminal, a control circuit for outputting chip information and resistors driven for generating thermal energy that is a kind of electromagnetic waves to obtain manufacturing information and inspection information in a contactless manner, so that a system thus configured operate in synchronization with an automated test equipment (ATM). Consequently, in an actual semiconductor integrated circuit, it is possible to improve quality while achieving security.

Description

technical field [0001] The present invention relates to the ease of inspection of semiconductor integrated circuits emphasizing fewer pins and safety. Background technique [0002] In a semiconductor integrated circuit where the safety of fewer pins is emphasized due to restrictions on the number of pins, chip size, and safety, it is difficult to install a test circuit, resulting in a situation where it is difficult to obtain information that can be inspected every year. [0003] In the conventional inspection method, in order to confirm the degree of completion of the semiconductor integrated circuit at the actual product level, a separately designed means to obtain inspection information using the semiconductor integrated circuit before the product, or a dedicated test input and output terminal, and a test dedicated mode, Generally, it is a means of checking information such as serially outputting test results represented by boundary scan testing. [0004] In addition, in...

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Problems solved by technology

[0008] However, it can be expected that semiconductor integrated circuits that emphasize fewer pins and safety will be expected in the future. As semiconductor devices become more complex, it is predicted that chip information cannot be obtained, or even if a scanning circuit can be installed, it is difficult to obtain chip information. Information takes more time etc.

In addition, since there is an output port to the outside, there is also a great danger from the viewpoint of safety.

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