On-line testing and analyzing device and method for microelectromechanical system component material parameter

A technology of micro-electromechanical systems and material parameters, which is applied in the direction of analyzing materials and instruments, and can solve problems such as online testing of MEMS material parameters.

Inactive Publication Date: 2006-09-06
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Applying this device, adopting the test method proposed by the present invention can solve the online test problem of MEMS material parameters

Method used

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  • On-line testing and analyzing device and method for microelectromechanical system component material parameter
  • On-line testing and analyzing device and method for microelectromechanical system component material parameter
  • On-line testing and analyzing device and method for microelectromechanical system component material parameter

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Experimental program
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Embodiment Construction

[0050] Specific implementation plan

[0051] According to the above-mentioned basic measurement method, combined with the specific test plan, it is necessary to design the test excitation signal and the design of the test output detection plan. The basic detection methods of test output can be roughly divided into: open circuit critical test; short circuit critical test; excitation-response relaxation test; direct voltage test; direct current test.

[0052] (1) Open circuit critical test

[0053] The so-called open-circuit criticality refers to continuously checking whether the test structure has an open circuit due to voltage or current while applying input voltage or current excitation. Once an open circuit occurs, record the excitation voltage or current value at the critical open circuit and calculate it as a substitution model Parameters.

[0054] Here we take the measurement of the breaking strength of the material as an example to illustrate the measurement plan. There are ...

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Abstract

Wherein, using electric excitation and electric parameter measurement to analyze material parameters and extract on-line; applying dc, ac and transient voltage or current to the MEMS device to force target generating opposite action and changing electric parameters (I, R, U and C); measuring parameters, and obtaining the required parameters (R, E, F, etc) according to software.

Description

Technical field [0001] The invention is a test and analysis method and device for on-line measurement of the material parameters of a micro-electromechanical system (MEMS) device. It belongs to the technical field of micro-electromechanical systems. Background technique [0002] With the continuous maturity and development of MEMS processing technology, micro-machining technology has been increasingly used in the manufacturing process of sensors and actuators. The performance of MEMS devices is not only affected by design and processing, but also very sensitive to material parameters. An important difference between MEMS devices and ordinary microelectronic devices is: MEMS devices may have movable parts, that is to say, some MEMS devices work through movement. For example, a MEMS resonator, its core is a component that performs an oscillating motion. When the external excitation frequency reaches the local oscillator frequency of the resonator, the resonator generates oscillatio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N35/00
Inventor 李伟华
Owner SOUTHEAST UNIV
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