Method of mfg. optical component
A manufacturing method and technology of optical components, applied in the fields of optics, photographic plate-making process of patterned surface, optical mechanical equipment, etc., can solve problems such as uneven distribution of light energy and difficulty in correct positioning
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[0022] The following is based on figure 1 The flow chart of the figure illustrates an embodiment of the present invention. First, a large transparent substrate 1 such as a flat glass plate is prepared, and the metal film 9 is uniformly formed thereon (step S1). Here, although a square plate is used as the shape of the transparent substrate 1 for description in this embodiment, the present invention is not limited thereto, and the transparent substrate 1 may be in the shape of a circular plate. In addition, at this time, the surface of the large transparent substrate 1 on which the metal film 9 is formed is previously polished.
[0023] Then, like figure 2 As shown in (b), the flat plate-shaped large transparent substrate 1 formed with the metal film 9 is kept in a stable state, and a photosensitive agent such as a photoresist is coated on the surface, and used figure 2 The mask member 4 shown in (a) forms an exposure pattern by exposing the punched part of the mask membe...
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