Non-volatile memory, its production and operation
A non-volatile, manufacturing method technology, applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve problems such as affecting adjacent memory cells, and achieve the effect of improving reliability
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[0060] In the following embodiments, the present invention is described by taking the first conductivity type as n-type doping type and the second conductivity type as p-type doping type. However, those skilled in the art can easily deduce that the doping types of the first conductivity type and the second conductivity type can be exchanged with each other, so the description of the opposite doping types of the following embodiments is omitted. In addition, in the following embodiments, a NOR type non-volatile memory sharing the same auxiliary gate layer is used for illustration.
[0061] figure 2 It is a schematic top view illustrating a non-volatile memory according to a preferred embodiment of the present invention. Figure 3A By figure 2 The cross-sectional schematic diagram obtained from the I-I' section (X direction). Figure 3B By figure 2 The schematic cross-sectional view obtained from the II-II' section (Y direction).
[0062] Please also refer to figure 2 ...
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