Chuck workbench moving arrangement

A technology of chuck table and moving mechanism, which is applied in the direction of metal processing machinery parts, manufacturing tools, conveyor objects, etc., and can solve problems that may not be able to meet the high-precision movement of chuck table

Active Publication Date: 2006-12-27
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the chuck table moving mechanism disclosed in the above publication transmits 20% of the vibration of the externally threaded screw to the chuck table, it may not be able to meet the needs of making the chuck table move with high precision.

Method used

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  • Chuck workbench moving arrangement
  • Chuck workbench moving arrangement
  • Chuck workbench moving arrangement

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Experimental program
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Embodiment Construction

[0020] Next, the preferred embodiment of the chuck table moving mechanism constructed according to the present invention will be described in more detail with reference to the accompanying drawings.

[0021] figure 1 It is a perspective view showing main parts of a cutting device equipped with a chuck table moving mechanism according to the present invention.

[0022] figure 1 The cutting device shown is equipped with: a stationary base 2; a chuck table mechanism 3 which is movably arranged on the stationary base 2 in the machining feed direction indicated by the arrow X to support the workpiece; In the indexing feed direction represented by arrow Y (the direction perpendicular to the processing feed direction represented by arrow X), the spindle supporting mechanism 6 that is movably arranged on the stationary base 2; A spindle assembly 7 serving as a cutting mechanism is movably arranged on the spindle support mechanism 6 in the tool depth feeding direction.

[0023] The ...

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PUM

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Abstract

The present invention provides one kind of chuck bench moving mechanism capable of absorbing the vibration of the external screw and supporting the chuck bench with supported machined article to move at high precision. The chuck bench moving mechanism possesses a chuck bench supporting mechanism, a guide track and an external screw. The chuck bench supporting mechanism is provided with a supporting pedestal; several movable pedestals set between the supporting pedestal and the external screw, including one adjacent to the external screw with inner thread fitting the thread in the external screw; and several power transmitting mechanisms set separately between the movable pedestal adjacent to the supporting pedestal and the supporting pedestal and between two adjacent movable pedestals, and with vibration absorbing mechanism to transmit the power in the machining feeding direction.

Description

technical field [0001] The present invention relates to a chuck table moving mechanism, which is equipped on a cutting device that cuts a workpiece such as a semiconductor wafer or a processing device such as a laser processing device that applies laser processing to a processed object, so that the chuck that supports the processed object The disc table moves in the machining feed direction. Background technique [0002] In the manufacturing process of semiconductor devices, on the surface of a substantially disk-shaped semiconductor single crystal, a plurality of areas are divided by dividing lines called "streets" arranged in a grid pattern, and ICs are formed on the divided areas. , LSI and other circuits. Then, the semiconductor wafer is cut along planned dividing lines to divide into regions where circuits are formed, thereby manufacturing individual semiconductor chips. And by laminating the single crystal of optical devices such as gallium nitride-based compound sem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/687H01L21/68H01L21/677H01L21/67H01L21/301H01L21/00B23K37/04B23K26/00B23Q1/58B23Q5/44
Inventor 关家一马秋田壮一郎
Owner DISCO CORP
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