Infrared radiating element and gas sensor using the same

A technology of infrared radiation and components, applied in the field of gas sensors, which can solve the problems of melting and easy damage of heat generators
CN1886820AInactive Publication Date: 2006-12-27MATSUSHITA ELECTRIC WORKS LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
MATSUSHITA ELECTRIC WORKS LTD
Publication Date
2006-12-27
Estimated Expiration
Not applicable · inactive patent

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Abstract

Disclosed is an infrared light emitting device (A) comprising a semiconductor substrate (1), a heat insulating layer (2) having a heat conductivity sufficiently lower that that of the semiconductor substrate (1) and formed on one surface of the semiconductor substrate (1) in the thickness direction, a lamellar heating layer (3) having a heat conductivity and electrical conductivity higher than those of the heat insulating layer (2) and formed on the heat insulating layer (2), and a pair of pads (4) formed on the heating layer (3) for electrical conduction. The semiconductor substrate (1) is composed of a silicon substrate. The heat insulating layer (2) and the heating layer (3) are composed of porous silicon layers having different porosities, and the porous silicon layer for the heating layer (3) has a lower porosity than that for the heat insulating layer (2). By using such an infrared light emitting device (A) as the infrared radiation source in a gas sensor, there can be realized an infrared radiation source having a prolonged life.
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Description

Technical field

[0001] The invention relates to an infrared radiation element and a gas sensor using the infrared radiation element. Background technique

[0002] Various types of analyzers using infrared radiation sources have been provided, such as infrared gas analyzers. The typical infrared radiation source used in this type of analyzer is a halogen lamp. However, the halogen lamp is large and has a short life span, so it is difficult to use it for a small gas sensor that uses infrared light to detect gas.

[0003] Therefore, as an infrared radiation source that can be miniaturized, infrared radiation elements formed by micromachining technology have been developed in many places (for example, see Japanese Unexamined Patent Publication No. 9-153640 (

[0027] -

[0028] paragraphs). , figure 2 ), Japanese Unexamined Patent Publication No. 2000-236110 (

[0017] -

[0019] paragraphs, figure 1 with 2 ) And Japanese Unexamined Patent Publication No. 10-294165 (paragraphs

[0014] -

[0015] , fig...

Claims

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