Optical system and control method thereof

Abstract

The present invention relates to an optical system and control method thereof. The optical system of the invention includes: a plurality of light sources, an optical multiplexer, wherein the optical multiplexer has a plurality of light receive sections receiving the light outputting from the light source, an optical guide part for changing the optical direction of one light receive section from a plurality of light receive sections and guiding to the optical guide part of the light output part; an optical splitter, used for splitting the light from the optical multiplexer and outputting the optical splitting information; an optical data processing part, used for decoding the optical splitting information outputted from the optical splitter and processing. Thereby, an optical multiplexer is provided to select one light from multiterm lights and also a system with simple apparatus and low cost.

Description

technical field [0001] The present invention relates to an optical system including an optical multiplexer and its control method, in particular to an optical system including an optical multiplexer capable of selectively outputting a plurality of input lights and its control method. Background technique [0002] A spectroscope is an optical device for splitting light input from a light source and detecting the intensity of each wavelength of the split light. The user obtains information on the composition or properties of the light source based on the data obtained by the beam splitter. Such beam splitters can also be used in connection with individual chambers used in semiconductor processes etc. for providing all light information generated inside the chamber. [0003] figure 1 It is a control block diagram for explaining an optical system using a conventional beam splitter. As shown in the figure, the optical system includes: a plurality of...

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Problems solved by technology

This shows that relative to the total time for the user to obtain the required optical data, the actual working time of the optical splitter 40, 50, 60 is very short, so it can be seen that the use efficiency of the optical splitter 40, 50, 60 is very low

[0007] However, since such beam splitters 40, 50, 60 are connected to each light source 10, 20, 30, the overall manufacturing cost of the system is increased, and an additional beam splitter will be provided as the number of light sources increases, thus causing the system complex structure

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