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188results about "Light control" patented technology

Light intensity self-adaptive adjusting system and method for flower planting and medium

The invention discloses a light intensity self-adaptive adjusting system and method for flower planting and a medium, and relates to the technical field of flower planting, and the system comprises a joint matching module which is used for carrying out the joint matching of illumination intervals through a growth stage recognition result; the optimization module is used for performing feedback correction on the flower growth effect by taking the matched illumination interval as an optimization space; the control fitting module is used for executing control fitting of the light source by taking the optimal illumination track of the batch as a following target; the individual feedback module is used for executing adaptive illumination adaptation evaluation of the individual according to the growth tracking mark; and the correction module is used for executing clustering control feedback of the dimmable LED light source. The technical problems that in the prior art, flower planting illumination adjustment cannot adapt to different growth stages of flowers and individual difference requirements, illumination adjustment precision and flexibility are insufficient, and consequently the flower growth quality is poor are solved, and the technical effect of improving the flower growth quality and flower planting efficiency is achieved.
Owner:NANJING INST OF VEGETABLE SCI

Collaborative light regulation and control decision-making method and system

The invention discloses a collaborative light regulation and control decision method and system, and relates to the technical field of intelligent regulation and control of plant factory light environments, and the system comprises a plant physiology monitoring unit which is provided with a non-invasive microelectrode array and a hyperspectral imager; and the environment sensing unit is used for collecting illumination intensity, spectrum, temperature, humidity and carbon dioxide concentration data. According to the collaborative light regulation and control decision-making method and system, fusion of multi-source heterogeneous data is realized through a pulse time sequence coding mechanism, and the problem that environmental parameters and plant physiological statuses are difficult to collaboratively analyze in the prior art is solved; based on a dynamic optimization architecture of double-alliance Nash equilibrium, autonomous collaborative decision-making of spectrum parameters can be completed in a short time, and compared with a traditional preset light formula, the response speed is improved; decision effectiveness can be synchronously guaranteed on the virtual model and biological entity level, the light suppression misjudgment rate is reduced, and meanwhile the plant light energy utilization rate is stably improved.
Owner:SANMING UNIV +1

Light formula generation method and system based on dendrobium officinale polysaccharide synthesis

The invention discloses a light formula generation method and system based on dendrobium officinale polysaccharide synthesis, particularly relates to the technical field of plant factory light environment regulation and control, and is used for solving the technical bottlenecks of polarization state instability and insufficient light signal penetration uniformity caused by environment interference in existing polarization state light regulation and control. A polarization state distortion area is sensed in real time based on Stokes parameters, physical interference factors of a reflection path and medium scattering are extracted, polarization state compensation parameters are generated through cross-correlation modeling, a laser light source direction angle and a phase delay amount are cooperatively optimized, and re-calibration of a distortion matrix is triggered through colorimetric method penetration uniformity verification; through closed-loop logic of physical interference traceability and dynamic compensation, the polarization stability of optical signals and the penetrability of plant tissues are synchronously improved, and efficient cooperation of a dendrobium officinale light response mechanism and a polysaccharide synthesis path is guaranteed.
Owner:SANMING UNIV +1

Illumination adjusting device for citrus planting

The invention relates to the technical field of planting, and provides an illumination adjusting device for citrus planting, and the device comprises an illumination monitoring module which is used for monitoring the illumination intensity and illumination duration in a citrus planting area in real time; the control module is electrically connected with the illumination monitoring module and is used for receiving monitoring data of the illumination monitoring module and analyzing and processing the monitoring data; and the light supplementing device is electrically connected with the control module and comprises a plurality of LED lamp beads with different spectrums, and the control module controls the light supplementing device to be turned on and turned off according to the monitoring data and adjusts the luminous intensity and the spectrum combination of the light supplementing device. Through the illumination monitoring module and the control module, illumination intensity and spectrum combination can be monitored in real time and accurately adjusted according to citrus growth requirements, optimal illumination conditions are provided for citrus in different growth stages, and photosynthesis, growth and development, flower bud differentiation and fruit quality improvement of citrus are promoted; meanwhile, the problems of leaf burning and fruit sunburn caused by excessive illumination of the oranges can be effectively prevented.
Owner:JIANGXI SANNONG JUBOYUAN AGRI TECH CO LTD

Method and device for disinfecting objects

The invention relates to a method and a device for disinfecting a surface of an object or of a medium flowing in a cavity by irradiating it with electromagnetic radiation which lies in the visible wavelength range, wherein the colour or wavelength of the electromagnetic radiation is switched at short time intervals between two values, one of which lies in the shorter-wave, blue part of the visible spectrum and the other in the longer-wave, red part of the visible spectrum.
Owner:INGENIEURBÜRO RIEDRICH GMBH

Optomechanical system for projection lithography

An optomechanical system (24) for projection lithography has an object holder (7a) with an object displacement drive (7b) for moving an object (7) to be illuminated through an object field (6a) along an object displacement direction (y). An illumination optic (5) of the optomechanical system (24) has at least one micromirror array (19) for guiding illumination light (4) from a light source (3) to the object field (6a). At least a subset of tiltable micromirrors (20) of the micromirror array (19) can be switched between an illumination tilt position and an attenuation tilt position by means of a control device (23a), in which the illumination light (4) is directed towards a light trap (25) of the optomechanical system (24). By means of the optomechanical system (24) an actual illumination dose is specified with which an object structure is illuminated during a projection exposure process.The result is an optomechanical system with which an actual illumination dose can be flexibly and, in particular, with high dynamics specified during the projection exposure process.
Owner:CARL ZEISS SMT GMBH

Wavelength converter and solar cell

The invention relates to a device for wavelength conversion of electromagnetic radiation, in particular light, UV and / or infrared radiation, comprising at least one conversion layer comprising a wavelength-converting material and at least one wavelength-selective optical component. The device is characterized in that the wavelength-selective optical component is adapted to the absorption spectrum of at least one semiconductor. The invention also relates to a solar cell comprising the aforementioned device.
Owner:RUDLOFF MILAN

CONTROL DEVICE, OPTICAL SYSTEM AND LITHOGRAPHING PLANT

A control device (100) for controlling a number N, with N ≥ 1, of actuators (200) for actuating N optical elements (310) of an optical system (300), comprising a control node (K2) coupling to the actuator (200) for providing a control voltage (V2) for the actuator (200), and an amplifier (110) configured to receive a supply voltage (V1) provided at an input node (K1) and to provide an output voltage (V3) at an output node (K3), wherein the amplifier (110) comprises a plurality M, with M ≥ 2, of current sources (111, 112) comprising at least one controlled current source (112) and a holding capacitor (113) for maintaining the level of the provided output voltage (V3), wherein the controlled current source (112) comprises a transistor (114), whose gate terminal can be controlled by an adjustable first control signal (S1),and has an adjustable resistor (115) coupled to the transistor (114).
Owner:CARL ZEISS SMT GMBH

Lighting device for multiple people in the aircraft

ActiveDE102009010553B4General lightingSpotlightingLight equipmentEngineering
Lighting device (10) for a passenger transport vehicle, wherein the lighting device comprises: a lighting unit (13) designed to illuminate a projection area (31) differently with a light cone (130) based on a plurality of different lighting patterns; where the lighting patterns are pixel-based image data; an interface (12) to an external system for receiving and sending lighting data; and a control unit (11) designed to control the lighting unit with respect to the different lighting patterns based on the received lighting data; characterized by the fact that the lighting unit (13) is designed to generate multiple light cones in a coverage area of ​​the lighting unit depending on the pixel-based image data, so that a light cone results in a delimited lighting area within the coverage area and only the resulting lighting area is illuminated.
Owner:AIRBUS OPERATIONS GMBH

Solar-powered street lighting system with weather-adaptive control

A self-sufficient, solar-powered lighting system, comprising: a) a photovoltaic module (5) for converting solar energy into electrical energy, b) a rechargeable lithium iron phosphate battery (LiFePO4) (9) for storing the generated energy, c) at least one dimmable LED light (3) for illumination, d) a control unit with a microcontroller (13) and integrated control software, e) a communication module (17) for wireless data transmission (NB-IoT, LTE, or 4G), f) a sensor (11) for detecting the battery state of charge (SOC), g) a motion sensor (8) for detecting movements and determining the movement speed, h) program logic for dynamically controlling the light intensity, wherein at least the parameters battery state of charge (SOC), detected movement speed, and current and forecast weather data are evaluated,i) an energy output module for providing surplus energy to external consumers or for feeding into the local power grid, characterized in that the lighting unit has a reduced basic brightness in the idle state and, upon detection of movement, is increased to different brightness levels depending on the speed of movement, with additional animal-friendly transitions during switching on and off being provided, and the system preemptively charges the battery to the maximum value in the event of forecast bad weather in order to ensure extended self-sufficiency.
Owner:KLUG FELIX

Light-emitting device, lighting light source and lighting device

Light-emitting device comprising: a substrate; a first light-emitting element that emits a first light and is mounted on the substrate; a second light-emitting element that emits a second light and is mounted at a position on the substrate where the second light-emitting element can receive the first light, wherein the second light has an emission peak wavelength that is longer than an emission peak wavelength of the first light; and a control and / or regulating device that separately controls and / or regulates the first light-emitting element and the second light-emitting element, wherein the control and / or regulating device controls and / or regulates a current to be supplied to the second light-emitting element on the basis of an electromotive force generated by the second light-emitting element, which receives the first light, the control and / or regulating device includes: a measuring device that measures a voltage value of the electromotive force generated by the second light-emitting element; a memory that stores a relationship between the voltage value of the electromotive force and a current value of the second light-emitting element; a determining device that determines the current value corresponding to the voltage value measured by the measuring device, based on the voltage value and the relationship stored in the memory; and an adjusting device that adjusts the current to be supplied to the second light-emitting element so that the current has the current value determined by the determining device.
Owner:PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD

Tomato postharvest quality regulation and control light supplementing system based on white light-metabolism key enzyme coupling activation and application method of tomato postharvest quality regulation and control light supplementing system

The invention belongs to the technical field of facility horticulture postharvest treatment, and particularly relates to a tomato postharvest quality regulation and control light supplementing system based on white light-metabolism key enzyme coupling activation and an application method thereof, and the tomato postharvest quality regulation and control light supplementing system comprises an enzyme activity targeting white light module, an enzyme activity feedback module and a fruit bearing regulation and control module. According to the postharvest tomato quality regulation and control light supplementing system based on white light-metabolic key enzyme coupling activation, a white light spectrum segmentation-key enzyme activity dynamic matching coupling mechanism is innovatively designed by combining the regulation and control rule of white light on the activity of key enzymes such as carotenoid synthetase and phenylpropane metabolic enzyme of tomato fruits; through an adjustable broad-spectrum white light source and an enzyme activity feedback module, directional accumulation of beneficial metabolites such as carotenoids and flavonoid compounds and efficient degradation of alkaloids are realized.
Owner:DONGGUAN LEDESTAR OPTOELECTRONICS TECH CO LTD

Method for adjusting the light colour of at least two lamps and motor vehicles

Motor vehicle (1) with - at least two lamps (5, 5a, 5b, 5c) arranged distributed (3, 4, 12R) in the interior (2) of the motor vehicle (1), the light colour of which can be adjusted, - a sensor device (8, 9, 10, 11, 13L, 13R, 14, 15, 16) which is designed to record measurement data and has a biometric sensor (15), - a control device (6) which is designed by means of an evaluation unit (7) to evaluate the acquired measurement data, wherein - the biometric sensor (15) is designed to detect a heart rate of a driver, which relates to a physiological state of the driver of the motor vehicle (1), - the control device (6) is designed to adjust the light colour of the at least two lighting means (5, 5a, 5b, 5c) separately depending on the evaluation, and - adjust the intensity of interior lighting in accordance with the driver's heart rate.
Owner:MERCEDES BENZ GROUP AG

A detection method, system, and medium based on line spectral confocal microscopy.

This invention discloses a detection method, system, and medium based on line spectral confocalization. The method includes: determining the number of peaks; if the number of peaks is one, adjusting the light intensity value corresponding to the peak wavelength to be within the light intensity working range; if the number of peaks is not less than two, extracting the light intensity value corresponding to the peak wavelength, analyzing the peak morphology, and identifying the peak wavelength associated with each reflection region; analyzing the offset of the height of the specular reflection region, correcting the detection height of the specular reflection region to obtain the height difference between the reflection regions covered within the width of the line spot at any position on the scanning line; and adjusting the distance of the sensor relative to the surface of the object under test according to the height difference, so that there is one and only one valid peak in the spectral image at any position on the scanning line. This invention can accurately calculate the height difference between the specular reflection region and the diffuse reflection region covered within the width of the line spot, improving the signal-to-noise ratio of the spectral image and expanding the application scenarios.
Owner:HEFEI I TEK OPTOELECTRONICS CO LTD

Method for controlling a lighting effect of a lighting system using a lighting control panel

Method for controlling a lighting system with a lighting control panel (01), wherein digital control commands for controlling a lighting effect are generated in the lighting control panel (01), and wherein the control commands are transmitted via data connections to at least one lighting device of the lighting system, and wherein at least two control parameters for designing the lighting effect can be set on the lighting device by means of the control commands, and wherein the two control parameters form the control value axes (10, 11) of a control range level (09), and wherein control value combinations (15) consisting of at least two control values ​​of the two control parameters are transmitted from the control range level (09) to the lighting device to control the lighting effect, with the following method steps, a) defining at least two node points (12, 13, 17, 19, 24) in the setting range level (09), each node point (12, 13, 17, 19, 24) being defined by a value pair consisting of at least two setting values; b) calculating an effect function curve (14, 16, 18, 21, 23) which connects all nodes (12, 13, 17, 19, 24) in the adjustment range plane (09); c) selection of control value combinations (15) each lying on the effect function curve (14, 16, 18, 21, 23); d) Transmission of the selected control value combinations (15) from the effect function curve (14, 16, 18, 21, 23) as control commands to the lighting device.
Owner:MA LIGHTING TECH

Light environment optimization control method and system and intelligent illumination regulation and control multilayer plant factory based on photoelectric agriculture

The invention belongs to the technical field of plant factories, and particularly relates to a light environment optimization control method and system and an intelligent illumination regulation and control multi-layer plant factory based on photoelectric agriculture. Light environment optimization control specifically comprises the steps that multi-factor data of a plant growth environment is collected, a photosynthetic rate prediction model based on a least square support vector machine is constructed, and a photosynthetic rate prediction model is constructed; and predicting photosynthetic rate response curves in different light environments. And determining an inflection point of a photosynthetic rate curve through differential operation, and determining an optimal light quality ratio and a light environment regulation strategy based on cost-photosynthetic effect analysis. The factory roof is combined with the photovoltaic panel and the light uniformizing plate, and optimal utilization of natural light and artificial light is achieved. The energy utilization efficiency is improved, the growth efficiency and yield of plants are remarkably improved by precisely regulating and controlling the light environment, and the system is suitable for efficient planting of various plants.
Owner:UNIV OF SCI & TECH OF CHINA

Bottom mud resuspension dimming method for water source algae control

The invention discloses a bottom mud resuspension dimming method for water source algae control, and relates to the technical field of blue-green algae prevention and control, the method comprises the following steps: establishing an experiment system comprising a plurality of groups of independent water body simulation devices, each group of device being provided with a bivariate combination of bottom mud concentration and resuspension frequency; constructing a parameterized extinction model related to the sediment concentration and the sedimentation time based on the real-time illumination data of the vertical layered optical monitoring network; the turbidity of the water body is monitored in real time, when the turbidity exceeds a critical value, a dynamic compensation coefficient is generated, and a theoretical daily light receiving quantity threshold value is increased according to a direct proportion relation; traversing all double-variable combinations, and screening variable combinations which simultaneously meet the condition that the actual daily light receiving quantity is not greater than the theoretical threshold value subjected to turbidity correction and the product of the total bottom mud adding quantity and the mechanical energy consumption is minimized. According to the scheme, the parameter adaptability under the complex hydrological condition is remarkably improved, the theoretical optimal cost boundary is approached, and the algae control interruption risk is reduced.
Owner:RES CENT FOR ECO ENVIRONMENTAL SCI THE CHINESE ACAD OF SCI

Blue diffuser in white / white application to create a blue sky

A luminaire comprising two light source groups, each comprising at least one light source (1, 2), and an optical element (3), wherein the at least one light source (1) of the first light source group is designed to emit light with a first intensity profile (10) for radiating a first light color, which has a first mean intensity value averaged over a wavelength interval between 500 nm and 600 nm, and wherein the at least one light source (2) of the second light source group is designed to emit light with a second intensity profile (20) for radiating a second light color, which has a second mean intensity value averaged over the wavelength interval, wherein the first and the second intensity profiles differ, wherein the light sources (1, 2) of the light source groups are arranged on a light entry side of the optical element (3) and are thus arranged relative to the optical element (3),that the light emitted by them enters the optical element (3) at the light entry side of the optical element (3) before exiting at its light exit side, characterized in that the optical element (3) has a transmittance which is less than 60%, in particular between 5% and 60%, in a first wavelength range having a width of at least 50 nm, in particular of at least 80 nm, and which is more than 70%, in particular more than 80%, in a second wavelength range having a width of at least 30 nm, in particular at least 60 nm, and does not overlap with the first wavelength range, wherein a first intensity averaged over the first wavelength range and a second intensity averaged over the second wavelength range of the first intensity profile (10) each amount to at least 10%, in particular at least 15% of the first intensity mean value,and wherein a first intensity averaged over the first wavelength range and a second intensity averaged over the second wavelength range of the second intensity profile (20) are each at least 10%, in particular at least 15% of the second intensity mean value, wherein the at least one light source (1) of the first light source group is designed to emit a warm white light color with a color temperature of less than 3,500 K, and wherein the at least one light source (2) of the second light source group is designed to emit a cold white light color with a color temperature of more than 4,000 K.,
Owner:TRILUX GMBH & CO KG

Indoor landscape environment control method

The invention discloses an indoor landscape environment control method, and belongs to the technical field of image processing, and the method comprises the steps: collecting an indoor landscape image, extracting a G channel feature value according to RGB channel value distribution, constructing a green distribution diagram, and carrying out the partitioning of the image, thereby reducing the data size of model processing, facilitating the region classification, and improving the efficiency. According to the method, a vegetation area is found, the density degree of landscape vegetation is calculated, and the landscape illumination is accurately controlled by combining the area of the vegetation area, so that the method for accurately controlling the landscape light intensity according to the density degree of the landscape vegetation and the area of the vegetation area is realized.
Owner:LESHAN NORMAL UNIV

Configuring color to be displayed by lighting device

A method of configuring a color to be displayed by a lighting device includes: in response to determining that a target color disc mode of a plurality of preset color disc modes is set by a user, obtaining one or more initial color points according to a preset color point selection strategy for the target color disc mode; generating a color disc based on the one or more initial color points, wherein the color disc comprises a plurality of color points, and each of the plurality of color points corresponds to a color; and performing color configuring on the lighting device by using the plurality of color points included in the color disc.
Owner:APUTURE IMAGING IND CO LTD

Systems and methods for remote optical power supply communication for uncooled WDM optical links

An optical power supply includes a plurality of lasers in a laser array. Each of the plurality of lasers is configured to generate a separate beam of continuous wave laser light. The optical power supply includes a temperature sensor that acquires a temperature associated with the laser array. The optical power supply includes a digital controller that receives notification of the temperature from the temperature senor. The optical power supply includes an optical power adjuster controlled by the digital controller. The optical power adjuster adjusts an optical power level of one or more beams of continuous wave laser light generated by the plurality of lasers to produce an optical power encoding that conveys information about the temperature associated with the laser array as acquired by the temperature sensor. An electro-optic chip receives the beams of continuous wave laser light from the optical power supply and decodes the optical power encoding.
Owner:AYAR LABS INC

Optical fiber-based intelligent lighting system for submerged plants and its control method

The present invention discloses an optical fiber-based intelligent light-filling system for submerged plants and a control method thereof. The system comprises the following steps: obtaining an environmental image and environmental data of the submerged plant; segmenting the environmental image to obtain a regional environmental image; performing image recognition on the regional environmental image; calculating the biodiversity based on the image recognition result; determining the regional lighting requirement; performing feature extraction on the growth environment; determining a first light-filling requirement and a second light-filling requirement; constructing an intelligent light-filling model for submerged plants; inputting the first light-filling requirement and the second light-filling requirement into the intelligent light-filling model for submerged plants to obtain a light-filling strategy; and performing intelligent light-filling on the submerged plants according to the light-filling strategy. This method not only improves the accuracy and efficiency of optical fiber-based intelligent light-filling for submerged plants, but also has good interpretability and can be directly applied to an optical fiber-based intelligent light-filling system for submerged plants.
Owner:NANJING HYDRAULIC RES INST

Method for operating a smart home and a motor vehicle, corresponding control device and device with a control device

Method for carrying out coupled operation of a smart home device (6) located at a location (1) and a motor vehicle (11), wherein a communication connection (19) is established between the smart home device (6) and the motor vehicle (11) by means of a communication device (17) of the smart home device (6) and a communication device (18) of the motor vehicle (11), wherein generated signals directed towards carrying out the coupled operation are transmitted via the communication connection (19) from the smart home device (6) to the motor vehicle (11) and / or vice versa, wherein lighting of the location (1) is realized within the framework of the coupled operation.
Owner:AUDI AG

Method for generating a new lighting feature and / or new lighting information taking into account presentation information, computer system configured to carry out the method, and computer program product comprising software code sections

The invention relates to a method for generating at least one new piece of illumination information (8) and / or at least one new illumination feature, wherein at least one training data set comprising mutually associated presentation information (1) and illumination information (2) is obtained. Furthermore, a machine-learning model (5) is created using mutually associated illumination features (4) and presentation features (3), wherein the illumination features (4) and the presentation features (3) are obtained by analysis before and / or during the creation of the machine-learning model (5).Subsequently, new presentation information (6) is obtained, and at least one new illumination feature (8) and / or at least one new illumination information item is generated by inference with the machine-learning model (5) upon input of the new presentation information (6) and / or the new presentation features (7) obtained by analyzing the new presentation information (6). The invention further relates to a computer system (20) configured to carry out one of the methods, and to a computer program product comprising software code sections configured such that the method can be executed by at least one processor (24).
Owner:MA LIGHTING TECH

Method for operating a MEMS system and MEMS system

Method for operating a MEMS system (1) with at least one projection unit (8) for providing an image by means of at least one light beam and a deflection unit (6) for two-dimensionally deflecting the at least one light beam, comprising the steps: - driving (T1) the deflection unit (6) by means of at least one reference signal (S1, S2) so that the deflection unit (6) deflects the at least one light beam periodically at least two-dimensionally, - measuring (T2) at least one controlled variable of the deflection unit (6) which corresponds to an actual position of the deflected light beam, - determining (T3) a current deviation of the at least one controlled variable from a target variable corresponding to a target position of the light beam, - Calculating (T4) at least one compensation value based on the determined deviation, - Controlling (T5) the deflection unit (6) with respect to the deflection based on the calculated at least one compensation variable for reducing the deviation of the light beam from the target position by means of a repetitive controller as the control unit (3, 7) and / or the projection unit (8) with respect to the image provision based on the calculated at least one compensation variable for reducing the deviation of the light beam from the target position by means of the repetitive controller as the control unit (3, 7), wherein for controlling the deflection unit (6) the at least one compensation variable is additionally calculated based on an earlier deviation in at least one earlier period.
Owner:ROBERT BOSCH GMBH

Street lighting control order and street lighting control procedure

The present invention relates to a street lighting control arrangement (100) comprising a digital key device (110) assigned to a vehicle (120), at least one anchor (130) arranged on a road (250) and configured to establish a communication link with the digital key device (110) and to determine the position of the vehicle (120), at least one street lighting device (140) arranged on a road segment of the road (250), and a control device (150) configured to determine a trajectory (160) of the vehicle (120) based on the position determined by the anchor (130) and to activate and / or deactivate the lighting of road segments along the pre-calculated trajectory (160) of the vehicle (120) by means of the street lighting device (140). The present invention further relates to a street lighting control method.
Owner:BAYERISCHE MOTOREN WERKE AG

Light source for lighting a kitchen module and kitchen module

Light source for illuminating at least one kitchen module, wherein the light source has a ribbon-like structure, wherein the light source comprises at least two segments, wherein the segments can be controlled individually and / or in combination with respect to a luminous intensity and / or a luminous color and / or a temporal luminous gradient and / or a spatial luminous gradient.
Owner:SCHÜLLER MÖBELWERK GMBH

Control system and method for determining an illumination intensity in a fluorescence microscope and corresponding microscope system

A control system for automatedly determining an illumination intensity of at least one light source of a fluorescence microscope is provided. The control system is configured to automatedly determine, after a change in a light path, a control value for the illumination intensity of the at least one light source in order to achieve a desired value of an inspection parameter characterizing sample inspection. The light path comprises at least one of: an illumination path from the at least one light source to the sample and an imaging path from the sample to at least one detector. Determining the control value is based on: (i) a value of the illumination intensity that was set before the change in the light path, (ii) a value of the inspection parameter used before the change in the light path, and (iii) a physical model of the light path.
Owner:LEICA MICROSYSTEMS CMS GMBH