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Vacuum-coating machine with motor-driven rotary cathode

A technology of rotating cathode and coating machine, applied in coating, vacuum evaporation coating, metal material coating process, etc., can solve the problems of compensating the limitation of swing freedom, inconvenient refurbishment, high design and financial cost, etc. Achieve the effect of reducing noise and improving production quality

Inactive Publication Date: 2007-02-14
APPLIED MATERIALS GMBH & CO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

From a design point of view, this imposes restrictions on the degrees of freedom to compensate for oscillation
Furthermore, retrofitting existing machines with such rotary cathode drives has proven to be inconvenient, since it is only possible with high design and financial outlay
Subsequent considerations also basically concern the construction of new machines, which become relatively more expensive

Method used

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Examples

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Embodiment Construction

[0045]figure 1 A horizontal vacuum coating machine 1 according to the prior art is illustrated. The processing chamber 2 is limited by the lateral chamber walls 4, the chamber bottom 15 and the chamber cover 5, wherein the chamber cover 5 facilitates access to the processing chamber for maintenance and repair work. At least one rotating cathode 10 is arranged in the processing chamber 2, in this embodiment with a tubular target. However, the rotating cathode can likewise be of a solid design. The figure does not show the usual prior art fixtures such as magnets and / or cooling systems installed in the cathodes of the tubes. For the sake of clarity, the support and transport means for the workpiece to be processed in the processing chamber 2 are also not shown. These tools are well known to those of ordinary skill in the art, so those descriptions are superfluous. One end of the rotating cathode 10 is connected to a drive 6 via a wall opening 16 in the lateral chamber wall 4 ...

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Abstract

Vacuum coating apparatus has a rotary cathode (10) mounted in a tubular process chamber. The cathode drive unit (6) is attached to the process chamber casing (3) by a flexible mounting. This consists of a flexible plate (14) attached only to the casing, the drive unit being only attached to the plate.

Description

technical field [0001] The invention relates to a vacuum coating machine with a motor-driven rotating cathode according to the preamble of claim 1 and a device for correcting the oscillation of the rotating cathode. Background technique [0002] In vacuum coating technology, rotating coating cathodes (rotating cathodes) are being used more and more, one end of which is flange-mounted to a drive, which is usually positioned to accommodate the rotating In the chamber housing of the cathode processing chamber. In a vacuum coater, the rotating cathode can be positioned horizontally or vertically. For example, the first type (horizontal vacuum coater) is used for glass coating and the second type (vertical vacuum coater) is used for display coating. A rotating cathode is usually designed as a tubular target that rotates around a longitudinal axis with a permanent magnet system inside the tube. The magnetic field emitted from the permanent magnet passes through the target materi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34H01J37/34
CPCH01J37/3435C23C14/34
Inventor 安德烈亚斯·绍尔
Owner APPLIED MATERIALS GMBH & CO KG
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