Surface acoustic wave element and method for making same

A surface acoustic wave and component technology, applied in the direction of electrical components, impedance networks, etc., can solve the problems that the insertion loss of surface acoustic wave components cannot be effectively reduced, and achieve the effect of improving design freedom, long overlapping length, and reducing insertion loss

Inactive Publication Date: 2007-02-28
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the electrodes of the existing surface acoustic wave components with interdigital transducers are evenly overlapped electrodes, and this design cannot effectively reduce the insertion loss of the surface acoustic wave components

Method used

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  • Surface acoustic wave element and method for making same
  • Surface acoustic wave element and method for making same

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Embodiment Construction

[0011] A preferred embodiment of the present invention discloses a surface acoustic wave device 1 , please refer to FIG. 1 , the surface acoustic wave device 1 includes a substrate 10 , a piezoelectric film layer 20 , a first transducer 30 and a second transducer 40 . The substrate 10 is made of silicon material, and the piezoelectric film layer 20 is formed on the upper surface of the substrate 10. The piezoelectric film layer 20 is made of zinc oxide (ZnOx), lithium niobate (LiNbOx), lithium titanate ( LiTiOx) or lithium tantalate (LiTaOx) and other materials, the first transducer 30 has two opposite electrodes 32,34 and an electrical signal input terminal 36, the material of the two electrodes 32,34 can be gold, silver, copper or Aluminum, which are juxtaposed with each other to form a spiral shape, and the electrical signal input terminal 36 is located at one terminal of the two electrodes 32 , 34 . Wherein, the distance between adjacent two opposite electrodes is preferab...

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Abstract

The invention relates to a surface sonic wave element, which comprises one piezoelectric base plate, the first energy exchanger and the second energy exchanger that on the base plate and coupled. Wherein, at least one energy exchanger has two electrodes parallel in screw shape. Compared with present technique, the inventive electrodes are alternated into screw shape, to obtain long supposition length and reduce the insertion consumption; in addition, the parameters of screw electrode as length, etc can be changed to control the insertion consumption, frequency width, etc.

Description

【Technical field】 [0001] The invention relates to a surface acoustic wave element and a manufacturing method thereof, in particular to a surface acoustic wave element with relatively small insertion loss and a manufacturing method thereof. 【Background technique】 [0002] Surface acoustic wave components use waves propagating on the surface of an elastic solid for electrical signal processing. A typical surface acoustic wave device uses a transducer to convert electromagnetic signal waves traveling at the speed of light into acoustic signal waves slower than the speed of light. This dramatic wavelength reduction allows designers to implement some complex signal processing functions in a much smaller footprint than traditional circuit designs require. The surface acoustic wave components manufactured by advanced microelectronic processing technology have the advantages of small size, light weight, high reliability, good consistency and multi-function, and have been widely use...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/25H03H3/08
Inventor 颜硕廷
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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