Actuator and driving method thereof
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first embodiment
[0053] A first embodiment of an actuator in accordance with the present invention is described. A configuration of a lamination type piezoelectric device used as a displacing device in the following embodiments is shown in FIG. 1. The lamination type piezoelectric device 10 is formed by piling up of a plurality of ceramic thin plates 11 and electrodes 12 and 13 alternately disposed. The ceramic thin plates 11 is made of such as PZT showing piezoelectric characteristic. The ceramic thin plates 11 and the electrodes 12 and 13 are fixed by an adhesive. Two groups of electrodes 12 and 13 which are alternately disposed are respectively connected to a driving power source 16 via cables 14 and 15. When a predetermined voltage is applied between the cables 14 and 15, an electric field is generated in each ceramic thin plate 11 disposed between the electrodes 12 and 13. The direction of the electric field in the ceramic thin plates alternately disposed is the same. Thus, the ceramic thin pla...
second embodiment
[0077] A second embodiment of an actuator in accordance with the present invention is described. FIG. 10 shows a configuration of a truss-type actuator in the second embodiment. As can be seen from FIG. 10, the first piezoelectric device 10 is arranged in parallel with the normal direction at the contacting point of the chip member 20 with the rotor 40, and the second piezoelectric device 10' is arranged in parallel with the tangential direction. The other elements except the shape of the chip member 20 and the position of the spring 41 are substantially the same as those in the above-mentioned first embodiment.
[0078] A block diagram of a driving circuit is shown in FIG. 11. An oscillator 50 generates a sinusoidal signal having a predetermined frequency coinciding with resonance frequencies of the first piezoelectric device 10 and the second piezoelectric device 10'. A velocity sensor 56 such as a pulse encoder or a magneto-resistive device senses a rotation velocity of the rotor 40...
third embodiment
[0080] In the above-mentioned first and second embodiment, the piezoelectric device is used as the displacing device. The ceramics which is a material of the ceramic thin plate has larger damping ratio of the vibrations and the smaller magnification factor of the resonant vibration than those of the metal materials. Furthermore, the ceramics is stronger with respect to the pressure but weaker with respect to the tension, so that it will be separated from the adhered faces in the lamination type piezoelectric device. In a third embodiment, a series connection of a single layered piezoelectric device and an elastic member made of a metal is used as a displacing device.
[0081] A configuration of the actuator in accordance with the third embodiment is shown in FIG. 12. A first displacing device 60 and a second displacing device 60' are respectively configured by single layered piezoelectric devices (ceramic thin plates) 61 and 61', and elastic members 62 and 62'. No electrode is provided...
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