Nonvolatile semiconductor memory device
a semiconductor memory and non-volatile technology, applied in static storage, digital storage, instruments, etc., can solve the problems of reducing the operation speed, increasing the number of depleted memory transistors, and erroneous reading, and achieve the effect of little variation in erasing tim
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first embodiment
[0031]FIG. 1 is a cross sectional view showing a configuration of a memory transistor 1 of a flash memory in accordance with a first embodiment of the present invention. In FIG. 1, this memory transistor 1 includes a floating gate 2 formed above a surface of a well W at a semiconductor substrate with an insulating layer interposed, a control gate 3 formed thereabove with an insulating layer interposed, and a source 4 and a drain 5 formed on the well W surface on the opposite sides of gates 2, 3, respectively. Prescribed voltages VW, VG, VS, VD are applied to well W, control gate 3, source 4, and drain 5, respectively. Threshold voltage VT of memory transistor 1 varies depending on the number of electrons in floating gate 2.
[0032] In a reading operation, as shown in FIG. 2A, 1V is applied to drain 5 of memory transistor 1, 3.3V is applied to control gate 3, and 0V is applied to source 4 and well W, so that it is determined whether a current ID between drain 5 and source 4 exceeds a ...
second embodiment
[0059]FIG. 10 is a circuit block diagram showing a part in connection with data erasing in a flash memory in accordance with a second embodiment of the present invention, in contrast with FIG. 6. Referring to FIG. 10, read circuit 10 detects threshold voltage VT of memory transistor 1 selected by decoder 7. Read circuit 11 detects threshold voltages VTR1, VTR2 of two reference transistors 6 selected by decoder 8. Threshold voltage VTR1 is set at a voltage (for example 5.0V) between the threshold voltage (7.5V) of memory transistor having data “0” written and the threshold voltage (2.7V) of memory transistor 1 having data “1” written. Threshold voltage VTR2 is set at a voltage (2.8V-3.2V, for example 3.0V) slightly higher than the threshold voltage (2.7V) of memory transistor 1 having data “1” written.
[0060] Comparator 12 compares threshold voltage VT of memory transistor 1 detected by read circuit 10 with threshold voltage VTR1 of reference transistor 6 detected by read circuit 11,...
third embodiment
[0072]FIG. 14 is a block diagram showing a main part of a flash memory in accordance with a third embodiment of the present invention, in contrast with FIG. 6. Referring to FIG. 14, the present flash memory differs from the flash memory in FIG. 6 in that reference block RBLK is omitted, two read circuits 10, 11 are connected together to memory block BLK through decoder 7, and comparator 12 is replaced with two comparators 17 and 18.
[0073] In this flash memory, one memory transistor 1 preliminarily selected from a plurality of memory transistors 1 belonging to memory block BLK is uses as reference transistor 6. In the erasing operation, threshold voltage VTR of reference transistor 6 is decreased together with threshold voltage VT of all the memory transistors 1 in memory block BLK as the erasing target.
[0074] Read circuit 10 detects threshold voltage VT of memory transistor 1 selected by decoder 7. Read circuit 11 detects threshold voltage VTR of reference transistor 6 selected by...
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