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Teaching method and processing system

a processing system and teaching method technology, applied in the field of teaching methods and processing systems, can solve the problems of long teaching operation time and considerable time-consuming, and achieve the effect of preventing the transfer mechanism from interfering with another member

Inactive Publication Date: 2005-10-06
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0017] The present invention has been conceived to effectively solve the aforementioned drawback. An object of the present invention is to provide a teaching method and a processing system capable of drastically reducing and shortening a teaching operation time.
[0020] The transfer mechanism is temporarily stopped only at a location where there is a possibility of interference with another member and then adjusted and moved if necessary. On the other hand, the transfer mechanism is automatically moved in a location where there is no possibility of interference with another member. Accordingly, a teaching operation time can be greatly reduced.
[0024] Since the display unit displays thereon the message for informing the potential interference, the operator recognizes the message and, accordingly, it is possible to more effectively prevent the transfer mechanism from interfering with another member.

Problems solved by technology

Accordingly, even if the pick is automatically moved to a sufficiently safe position near the destination position initially, a section for manually moving the pick by a minute distance becomes quite long, which results in a considerably long teaching operation time.
Especially, such a teaching operation should be performed for almost all the delivery / reception positions of a semiconductor wafer as described above; and, thus, there is a drawback in that the teaching operation time becomes quite long.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

first preferred embodiment

[0073] Hereinafter, an exemplary teaching operation performed for an inlet port will be described with reference to FIGS. 7A to 7E and FIG. 8.

[0074]FIGS. 7A to 7E show an exemplary teaching operation performed for the inlet port in accordance with a first preferred embodiment of a method of the present invention, and FIG. 8 illustrates a flowchart depicting a flow of a teaching method of the present invention. Referring to FIGS. 7A to 7E, there is illustrated a case where a teaching operation of one pick A1 of the first transfer mechanism 22 is performed for a central inlet port 18B among three inlet ports 18A to 18C. In this case, a position aligning substrate W formed in the same size and shape of a semiconductor wafer is mounted on a lowest supporting bracket (not shown) of the cassette container 20, and a position (FIG. 7D) where the pick A1 accesses right under the position aligning substrate W is assumed to be a temporary moving destination position. Further, if the position ...

second preferred embodiment

[0087] Although the exemplary teaching operation performed for the inlet port has been described in the first preferred embodiment, an exemplary teaching operation performed for an orienter will be described in a second preferred embodiment.

[0088]FIGS. 9A to 9D show the exemplary teaching operation performed for the orienter in accordance with the second preferred embodiment of the present invention. Further, FIGS. 9A to 9D partially provide top views. Also in the second embodiment, a teaching operation for the pick A1 of the first transfer mechanism 22 will be described. Further, whenever the pick A1 is temporarily stopped at a potential interference location, the display unit displays thereon a message for informing the operator of a potential interference and the description thereof will be omitted.

[0089] As in the first preferred embodiment, a potential interference location and a temporary moving destination position for the orienter 26 are obtained in advance based on the de...

third preferred embodiment

[0096] Hereinafter, a teaching operation performed for a load-lock chamber in accordance with a third preferred embodiment will be described.

[0097]FIGS. 10A to 10E illustrate an exemplary teaching operation performed for the load-lock chamber in accordance with the third preferred embodiment of the present invention.

[0098] Herein, an operation for teaching the pick A1 with respect to the load-lock chamber 8A between two load-lock chambers 8A and 8B will be described as an example. The position aligning substrate W is mounted in advance on the mounting table 38A in the load-lock chamber 8A. Further, four potential interference locations shown in FIGS. 10A to 10D are obtained based on the design values of the processing system. FIG. 10E presents a temporary moving destination position. Moreover, since the display on the display unit is same as in the aforementioned case, the description thereof will be omitted.

[0099] First, if a moving instruction is inputted by pressing the go but...

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Abstract

A teaching method for storing in a controller a target moving position of a transfer mechanism in a processing system includes the steps of temporarily stopping the transfer mechanism in the middle of a moving route to a temporary moving destination position so as to make sure that the transfer mechanism does not interfere with another members at a potential interference location where there is a possibility that the transfer mechanism interferes with said another member, resuming to move the temporarily stopped transfer mechanism by inputting a moving instruction, repeating the temporarily stopping step and the resuming step, and when the pick reaches the temporary moving destination position, storing, as the target moving position, in the controller a position of the pick after adjusting and moving or without adjusting and moving the position of the pick.

Description

[0001] This application is a Continuation Application of PCT International Application No. PCT / JP03 / 11734 filed on Sep. 12, 2003, which designated the United States.FIELD OF THE INVENTION [0002] The present invention relates to a processing system for performing a pre-specified processing on an object to be processed such as a semiconductor wafer and a teaching method of a transfer mechanism employed in such a processing system. BACKGROUND OF THE INVENTION [0003] In general, in order to manufacture a semiconductor integrated circuit, various processings such as film forming, etching, oxidation and diffusion are performed on a wafer. Further, in order to improve a throughput and a yield along with the trend of miniaturization and high integration of the semiconductor integrated circuit, a semiconductor processing system known as a so-called cluster tool has been developed, wherein a plurality of processing apparatuses performing either a same process or different processes are couple...

Claims

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Application Information

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IPC IPC(8): B65B21/02H01L21/00H01L21/677H01L21/68
CPCH01L21/67167H01L21/67259H01L21/67778H01L21/68
Inventor KUMAGAI, MOTOHIROISHIZAWA, SHIGERUSAEKI, HIROAKI
Owner TOKYO ELECTRON LTD
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