Apparatus for aligning a tray and tray holder
Active Publication Date: 2006-09-07
SAMSUNG DISPLAY CO LTD
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- Abstract
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- Application Information
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Benefits of technology
[0018] The present invention also discloses an apparatus for aligning a tray and tray holder, including a driving unit in which a tray holder is coupled with one end of a movable shaft driven by a driving source, a coupling part including coupling arms, the coupling arms coupled with the tray holder and capable of coupling with a vertically positioned tray, and a first guide shaft. Further, a first end of the first guide shaft is coupled with the tray holder, and the guide is shaft prevents bending of the tray holder.
Problems solved by technology
Because positioning a larger substrate in a horizontal position for vacuum deposition may result in deflection of the substrate and defects in the deposited material, a vapor deposition system, in which a vapor deposition source moves in vertical direction in the vacuum chamber and injects the organic vaporized material on the substrate while in the vertical position, has been developed.
However, since the holder plate can be positioned vertically, deflection may occur.
Method used
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[0043] The invention is described more fully hereinafter with reference to the accompanying drawings, in which embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure is thorough, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. Like numerals refer to the same or similar components on the Figures.
[0044]FIG. 1A shows a schematic view of a vapor deposition source positioned in a buffer region of a conventional vacuum vapor deposition system. FIG. 1B shows a schematic view of a vapor deposition source positioned in a layer forming region of a conventional vacuum vapor deposition system.
[0045] Referring to FIG. 1A and FIG. 1B, a substrate 30 on which an organic material laye...
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Abstract
An apparatus for aligning a tray and tray holder, including a vertically positioned tray formed with coupling holes and a tray holder having coupling arms to couple with the coupling holes, and to prevent the bending of the tray and the tray holder. The tray includes a substrate frame that can receive a substrate, and the tray holder is coupled with a drive shaft for transferring the tray in the vertical position to a mask for vapor deposition. One end of a plurality of guide shafts securely contacts the rear side of the tray holder to prevent bending of the tray holder. The tray can have magnetic attaching members and the tray holder can have supporting members corresponding to the attaching members. The supporting members can magnetically couple with the attaching members in a position determined by corresponding grooves or protrusions to align the tray and tray holder.
Description
CROSS REFERENCE TO RELATED APPLICATIONS [0001] This application claims priority to and the benefit of Korean Patent Application No. 2005-0000948, No. 2005-0000952, and No. 2005-0000953, all filed on Jan. 5, 2005, which are hereby incorporated by reference for all purposes as if fully set forth herein. BACKGROUND OF THE INVENTION [0002] 1. Field of the Invention [0003] The present invention relates to a tray and tray holder aligning apparatus, and more particularly, to a tray and tray holder aligning apparatus, including a vertically positioned tray with a coupling hole and a holder plate with a coupling arm coupled with the coupling hole. [0004] 2. Discussion of the Background [0005] Generally, an electric field light emitting display, which is a type of flat panel display, can be categorized as either a non-organic electroluminescent display or an organic electroluminescent display depending on the material used in a light emitting layer. Because an organic electroluminescent displ...
Claims
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Login to View More IPC IPC(8): B65D1/34B65D85/00
CPCC23C14/042
Inventor JUNG, SUNG WHAHAN, SANG JINKANG, EU GENE
Owner SAMSUNG DISPLAY CO LTD