Coating plant with a charging lock and device therefor
a technology of charging lock and coating plant, which is applied in the direction of ion implantation coating, coating, lifting valve, etc., can solve the problems affecting the cycle time of coating in the coating plant, and achieve the effect of quick closure and opening of the lock
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[0029]FIG. 1 shows a lateral view of a transmission gear, especially a reciprocating or swinging cam drive, with one driving shaft 2 and two driven shafts 3 and 4, the latter performing an interdependent movement. While the driving shaft 2 is effectively connected to a drive, an electric motor for example, the driven shafts are connected for operating purposes to the shutter 6 and the latch 7 of the lock (see FIG. 4). Accordingly, both the driving shaft 2 and the driven shafts 3 and 4 comprise coupling means to connect them to the drive, the shutter 6 and the latch 7, as can best be seen, for example, in FIG. 2 for the shaft 4.
[0030] The transmission gear couples the driven shafts 3 and 4 to each other in such a manner that both the shafts 3 and 4 will be automatically rotated or swiveled when the driving shaft 2 is driven by means of a drive or motor. In particular, the coupled movement of the shafts 3 and 4 is phase-staggered, as can be seen from the motion diagram of FIG. 3. Acc...
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