Film-forming material and method for predicting film-forming material

a technology of film-forming material and film-forming material, which is applied in the field of film-forming material and the prediction of film-forming material, can solve the problems of difficult analysis of organic el materials and no analysis of material suitable for the apparatus

Inactive Publication Date: 2009-04-30
TOHOKU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0039]In this invention, it is possible to provide a film-forming material suitable for film formation using a carrier gas. Further, there are provided an analysis method for deriving from experimental data a value of a parameter that defines a characteristic of a film-forming material, a prediction method for predicting a film-forming material based on this parameter, and a film forming method using this parameter.

Problems solved by technology

In the present situation, organic EL materials used in these organic EL devices are not fully open to the public about their compositions, characteristics, and so on and, further, it is difficult to analyze these organic EL materials, and therefore, experiments and studies are conducted only relying on specifications from the maker side.
However, in the circumstances where the organic EL materials for film formation are not specified as described above, there are those instances where it is not possible to judge whether or not the intended film formation has been obtained, which thus has been a hindrance to the experiments and studies.
Further, the situation has been such that even in the apparatus shown in Prior Application 1 that transports an evaporated organic EL material using a carrier gas to thereby form a film on a substrate, no analysis is made as to what material is suitable for the apparatus.

Method used

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  • Film-forming material and method for predicting film-forming material
  • Film-forming material and method for predicting film-forming material
  • Film-forming material and method for predicting film-forming material

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first embodiment

[0054]Referring to FIG. 1, a film forming apparatus according to this invention is schematically illustrated. The illustrated film forming apparatus comprises an organic EL source section 20 having a plurality of organic EL sources, first and second film forming sections 26 and 27, and a switching section 29 (switching means) for supplying an evaporated organic EL material from the organic EL source section 20 selectively to the first and second film forming sections 26 and 27. The switching section 29 comprises piping, orifices, mass controllers (flow control systems), valves, and so on. In this connection, the switching section 29 is controlled by a controller (not shown) that controls the valves, the orifices, the flow control systems, and the valves.

[0055]Specifically, the illustrated organic EL source section 20 has container sections (hereinafter referred to as raw material container sections) containing organic EL raw materials corresponding to the number of organic EL films ...

second embodiment

[0068]Referring to FIG. 2, there is shown a conceptual diagram of a film forming apparatus according to this invention. The illustrated example differs from the film forming apparatus of FIG. 1 in that an organic EL raw material from an organic EL source section 20 is individually supplied to three film forming sections, i.e. first to third film forming sections 26 to 28, through a switcher 29, while it is supplied only to the two film forming sections 26 and 27 in the film forming apparatus of FIG. 1. In the illustrated example, the third film forming section is connected to the switcher 29 through a piping system 333 and the piping system 333 is controlled in the same manner as the other piping systems 331 and 332.

[0069]At any rate, in the film forming apparatus shown in FIG. 2, an evaporated organic EL raw material from each raw material container section 201 is selectively supplied to the first to third film forming sections 26 to 28 through a switcher 29.

[0070]Referring to FIG....

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Abstract

Disclosed is a method for prediction of a film material such as a raw material for organic EL. In the method, a film material having an evaporation rate (V(%)) represented by the formula below can be predicted based on the values of the constant (Ko) and the activation energy (Ea). V=(Ko/P)×e−Ea/kT wherein Ko represents a constant (%·Torr), P represents a pressure (Torr), Ea represents an activation energy (eV), k represents a Boltzmann constant, and T represents an absolute temperature.

Description

TECHNICAL FIELD[0001]This invention relates to a film-forming material that is formed into a film by a film forming apparatus, its prediction method and analysis method, and a film forming method.BACKGROUND ART[0002]A method of forming a layer of a predetermined material by evaporating a raw material of the predetermined material is widely used in the manufacture of semiconductor devices, flat panel display devices, and other electronic devices. A description will be given hereinbelow using an organic EL display device as one example of those electronic devices. The organic EL display device having a sufficient brightness and a lifetime of several tens of thousands of hours or more uses an organic EL element being a self-light-emitting element and, thus, since peripheral components such as a backlight are small in number, it can be formed thin, and therefore, it is ideal as a flat panel display device.[0003]The organic EL element constituting such an organic EL display device is req...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): C23C16/00G01N31/00
CPCC23C14/12C23C14/228C23C14/243C23C16/44C23C14/562H01L51/0008H01L51/56C23C14/56H10K71/16H10K71/00H01L21/02263
Inventor OHMINAKAYAMA, SHOZOITO, HIRONORI
Owner TOHOKU UNIV
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