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Organic electroluminescence display device and manufacturing method therefor

Inactive Publication Date: 2012-02-23
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0009]Therefore, an object of the present invention is to provide an organic EL display device and a manufacturing method therefor, which are capable of reducing a contact area between a vapor deposition mask and an insulating layer arranged around each pixel so as to prevent transfer of an attached matter from the vapor deposition mask to the insulating layer, without increasing the number of steps or manufacturing cost.
[0013]According to the present invention, the contact area between the vapor deposition mask and the insulating layer arranged around each pixel can be reduced so as to prevent transfer of an attached matter from the vapor deposition mask to the insulating layer, without increasing the number of steps or manufacturing cost. Therefore, it is possible to obtain an excellent effect that the surface of the insulating layer is hardly damaged by abrasion or scratch due to transfer of an attached matter from the vapor deposition mask, to thereby prevent entrance of moisture so that the risk of a short-circuit between electrodes can be reduced.

Problems solved by technology

Accordingly, when a tension is applied to the vapor deposition mask, the surface of the insulating layer may be damaged due to a scratch by rubbing.
If the insulating layer is damaged, moisture may easily enter through the damaged part, and hence the emission life may be shortened.
In addition, if the attached matter on the vapor deposition mask enters a light emitting part in the pixel aperture, the organic compound layer formed inside is easily disconnected in a vicinity of the foreign substance, resulting in an emission defect caused by a short-circuit between electrodes.
In order to partially control the exposure amount, for example, a method of using two photomasks and a method of using a halftone mask are employed, each of which, however, causes an increase in the number of steps and an increase in manufacturing cost due to increasing cost of the photomask.
Thus, there has been a problem in productivity.

Method used

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  • Organic electroluminescence display device and manufacturing method therefor
  • Organic electroluminescence display device and manufacturing method therefor
  • Organic electroluminescence display device and manufacturing method therefor

Examples

Experimental program
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example 1

[0062]With reference to FIGS. 1A and 1B, 2, and 3A to 3E, a manufacturing method for the organic EL display device according to Example 1 is described. FIG. 1A schematically illustrates a cross sectional structure of one pixel region, and illustrates a state where the hole transport layer 22 is formed to have the same thickness in all pixels. When multiple pixels having the cross sectional structure illustrated in FIG. 1A are arranged in matrix, a display region of the organic EL display device is constituted. In addition, three sub-pixels including p1, p2 and p3 are arranged in parallel in one pixel region. Note that, the organic EL display device described here has a pixel pitch of 191 μm and a sub-pixel size of 64 μm×191 μm.

[0063]As illustrated in FIGS. 1A and 3A, transistors are formed correspondingly to individual sub-pixels on the substrate 10. Note that, in FIGS. 1A and 1B, only gate lines 25 of the transistors, the gate insulating layer 26, and a passivation layer (insulatin...

example 2

[0076]With reference to FIG. 7, a manufacturing method for an organic EL display device according to Example 2 is described. FIG. 7 illustrates a process of forming the emission layer in the sub-pixel. Note that, the substrate described in this example has a size of 60 mm×460 mm×0.5 mmt, and 5×5 panel regions are disposed. In each panel region, the structure of the transistor, the first insulating layer 11, the first electrode 13, and the second insulating layer 12 formed on the substrate 10 is the same as in Example 1.

[0077]As illustrated in FIG. 7, when the vapor deposition of the emission layer is performed, the vapor deposition mask 19 having the opening that exposes the first electrode 13 in the sub-pixel p2 is positioned so as to contact with the hole transport layer 22 deposited on the surface of the second insulating layer 12. Particularly in this example, after positioning the substrate with respect to the vapor deposition mask 19, the substrate is pressed to the vapor depo...

example 3

[0080]With reference to FIG. 8B, a manufacturing method for an organic EL display device according to Example 3 is described. FIG. 8B schematically illustrates a plane structure of a 3×2 sub-pixel region, and multiple sub-pixel regions are disposed in matrix so that the display region of the organic EL display device is constituted.

[0081]The second insulating layer 12 illustrated in FIG. 8B is formed so as to have the recesses 17 reflecting the openings 15 by forming the grating-like openings 15 in the peripheries of the first electrodes 13 in the first insulating layer 11. The grating-like opening 15 is formed to communicate to the contact hole 16 that can electrically connect the first electrode 13 to the drain electrode of the transistor.

[0082]The opening 15 having a depth of 2 μm and a width of 20 μm is formed in the first insulating layer 11 between the first electrodes neighboring in an X direction in FIG. 8B, and the second insulating layer 12 is formed to surround the first ...

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PUM

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Abstract

Provided is an organic eletroluminescence display device, which is capable of preventing transfer of an attached matter from the vapor deposition mask to the insulating layer, without increasing steps or manufacturing cost. The organic eletroluminescence display device includes: a first insulating layer formed on a substrate; multiple first electrodes disposed on the first insulating layer; an opening formed in the first insulating layer at a periphery of the first electrode; a second insulating layer disposed in a region overlapping with the opening; an organic compound layer covering the first electrodes; and a second electrode formed on the organic compound layer, in which: a material forming the first electrodes is absent in the opening; and the second insulating layer has a recess formed in a surface thereof, reflecting the opening of the first insulating layer, the recess being formed in a vertical direction of the substrate surface.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to an organic electro luminescence (EL) display device including multiple organic EL elements each having organic compound layers containing an emission layer between electrodes, and to a manufacturing method therefor.[0003]2. Description of the Related Art[0004]In recent years, as a flat panel display, an organic EL display device that is a self-emission device has attracted attention and has been developed actively.[0005]On a substrate of such an organic EL display device, multiple first electrodes are arranged in matrix, and organic compound layers expressing different light emission colors are respectively formed on the first electrodes by a vacuum deposition method. In this case, a vapor deposition mask having multiple pixel apertures is brought into contact with the surface of an insulating layer having a protruding shape, so as to expose the first electrodes corresponding to pixels.[...

Claims

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Application Information

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IPC IPC(8): H01L33/02
CPCH01L51/5203H01L27/3246H10K59/122H10K59/805H10K50/805
Inventor UKIGAYA, NOBUTAKA
Owner CANON KK
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