Liquid metal ion source and secondary ion mass spectrometric method and use thereof

a technology of liquid metal ion and mass spectrometry, which is applied in the field of secondary ion mass spectrometric analysis methods, secondary ion mass spectrometers, and liquid metal ion sources, which can solve the problems of limited acceptance of date only, increasing the difficulty of building a spectrum library, and affecting the experimental complexity of this method

a technology of liquid metal ion and mass spectrometry, which is applied in the field of secondary ion mass spectrometric analysis methods, secondary ion mass spectrometers, and liquid metal ion sources, which can solve the problems of limited acceptance of date only, increasing the difficulty of building a spectrum library, and affecting the experimental complexity of this method

US20130216427A1Active Publication Date: 2013-08-22ION TOF TECH
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  • Liquid metal ion source and secondary ion mass spectrometric method and use thereof
  • Liquid metal ion source and secondary ion mass spectrometric method and use thereof
  • Liquid metal ion source and secondary ion mass spectrometric method and use thereof

Examples

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Embodiment Construction

[0039]The preferred embodiments of the present invention will now be described with reference to FIGS. 1-4 of the drawings. Identical elements in the various figures are designated with the same reference numerals.

[0040]For implementation of the examples according to the invention, as are represented in FIGS. 3 and 4, a bismuth liquid metal ion cluster source which contained 95% bismuth and 5% manganese in the alloy was used.

[0041]According to the invention, it emerged that bismuth cluster sources are ideally suited because of the heavy and intensive clusters and the different charge states for varying the fragmentation in the spectrum of an S-SIMS method or a G-SIMS method. The maximum achievable variation in the fragmentation is however still too low when using a pure bismuth cluster source.

[0042]Therefore in the present examples, as light an alloy component as possible was added to the bismuth emitter, which alloy component emits atomic primary ions in the lower mass range of the...

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Abstract

A liquid metal ion source for use in an ion mass spectrometric analysis method contains, on the one hand, a first metal with an atomic weight ≧190 U and, on the other hand, another metal with an atomic weight ≦90 U. One of the two types of ions are filtered out alternately from the primary ion beam and directed onto the target as a mass-pure primary ion beam.

Description

CROSS-REFERENCE TO RELATED APPLICATION[0001]This application is a divisional of U.S. patent application Ser. No. 12 / 739,993, filed May 7, 2010, now pending. This application claims priority from this parent application Ser. No. 12 / 739,993. The invention disclosed and claimed herein is related in subject matter to that disclosed in International Patent Application No. PCT / EP08 / 08781, filed Oct. 16, 2008 and European Patent Application No. 07021097.6, filed Oct. 29, 2007, all of which are incorporated herein by reference.BACKGROUND OF THE INVENTION[0002]The present invention relates to a liquid metal ion source, a secondary ion mass spectrometer, and also a secondary ion mass spectrometric analysis method as well as the use thereof.[0003]Secondary ion mass spectrometry is operated inter alia as so-called “Static Secondary Ion Mass Spectrometry” (SSIMS). An energy-rich primary ion beam is thereby directed onto a substrate surface to be analyzed. When impinging on the substrate, the pri...

Claims

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Application Information

Patent Timeline
22 Aug 2013
Publication
US20130216427A1
IPC
H01J49/10; C22C12/00
CPC
H01J37/08; H01J49/0031; H01J49/142; H01J49/10; H01J2237/31749; C22C12/00; H01J2237/0805
Inventors
KOLLMER, FELIX; HOERSTER, PETER