Substrate structure and manufacturing method thereof

Abstract

A substrate structure and its manufacturing method are provided. The substrate structure comprises a metal substrate, a first connection layer, a second connection layer, a dielectric material layer, a metal core layer and an internal component. The first and second connection layers are disposed on a surface of the metal substrate. The metal core layer having an opening is disposed on a surface of the first connection layer. The internal component having a plurality of electrode pads is disposed on a surface of the second connection layer and in the opening of the metal core layer. The dielectric material layer is disposed on the surface of the metal substrate. The first and second connection layers, the metal core layer and the internal component are partially covered with the dielectric material layer. The metal core layer is electrically connected to one of the electrode pads via the first and second connection layers and the metal core layer.

Description

CROSS REFERENCE TO RELATED APPLICATIONS[0001]This Non-provisional application claims priority under 35 U.S.C. § 119(a) on Patent Application No. 105130268 filed in Taiwan on Sep. 20, 2016, the entire contents of which are hereby incorporated by reference.BACKGROUND1. Technical Field[0002]This invention relates to a substrate structure and a manufacturing method thereof, in particular, to a semiconductor substrate structure and a manufacturing method thereof.2. Description of Related Art[0003]In recent years, users prefer electronic products with compact size, high performance and versatility. Thus, electronics manufacturers have to accommodate more components in a limited space of an integrated circuit (IC) to achieve high density and miniaturization. As a result, electronics manufacturers advance a new IC package for embedding components in a substrate to reduce the package size and the connection path between the components and the substrate.[0004]A chip scale package (CSP) is a t...

AI Technical Summary

Benefits of technology

The present invention provides a substrate structure and its manufacturing method that has rigidity and heat dissipation, while meeting the demands of fine line spacing, high-density, thinning trend, low-cost, and high electric characteristics.

Problems solved by technology

Thus, electronics manufacturers have to accommodate more components in a limited space of an integrated circuit (IC) to achieve high density and miniaturization.

It is difficult to narrow the aperture of the blind hole by laser drilling or mechanical drilling and cannot achieve the circuit with the fine pitch.

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