Manufacturing method of ceramic electrostatic chuck
a manufacturing method and electrostatic chuck technology, applied in the field of ceramic electrostatic chuck manufacturing method, can solve the problems of difficult to obtain ceramics of high purity, electrodes need to be mesh-shaped, and the thickness of the formed dielectric layer is variable, so as to achieve the effect of reducing the thickness variation and high purity
Active Publication Date: 2019-11-28
BLUE OCEAN RES & NETWORK LTD
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- Description
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- Application Information
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Benefits of technology
The present invention eliminates the need for certain additives used in conventional methods to promote sinterability, and also eliminates the need for other additives to adjust resistance values. This is possible because the composite ceramics used in the invention do not contain any other additives.
Problems solved by technology
However, in the abovementioned methods employing high temperature sintering, there may be variations in the thickness of the formed dielectric layer due to the shrinkage of ceramics.
Accordingly, it is difficult to obtain ceramics having a high purity.
Moreover, in the methods employing hot-pressing, one restriction is that the electrode needs to be mesh-shaped, since voids easily occur at the interface between the ceramics and the high-melting metal plates used as electrodes.
Method used
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Embodiment Construction
[0013]FIG. 1 is a cross-sectional view of an electrostatic chuck manufactured according to an embodiment of the present invention.
[0014]As shown in FIG. 1, an electrostatic chuck 1 includes: a dielectric layer 2, an electrode pattern 3-a, a bonding layer 4-a on dielectric layer side, a bonding layer 4-b on first insulator layer side, and a first insulator layer 5-a.
[0015]The dielectric layer 2 is a dielectric formed of a sintered body of a ceramic material or a composite ceramic material, which has a density of 95% and more. The ceramic material may be, for example, Al2O3, sapphire, Y2O3, AlN, Si3N4, etc. With regard to volume resistivity for the ceramic material or composite ceramic material of the sintered body, the dielectric layer and the insulator layers may have a volume resistivity of 1.0E+8(Ωcm) or greater. Further, composite materials, into which SiC, TiO2, TiN, etc. are added for adjustment of resistance values, may be used for the dielectric layer and the insulator layer...
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Abstract
The present invention provides a method for manufacturing a ceramic electrostatic chuck which enables high purity and minimum thickness variation of a dielectric layer formed of ceramics or composite ceramics. The method includes: forming grooves for electrode pattern formation in a dielectric layer formed of ceramics or composite ceramics and having a density of 95% or greater; forming an electrode pattern by filling the grooves with a metal; forming an activated bonding layer configured for joining on the dielectric layer; and joining an insulator layer, which is formed of ceramics or composite ceramics and has a density of 95% or greater, with the dielectric layer.
Description
CROSS REFERENCE TO RELATED APPLICATIONS[0001]The present application claims priority from Japanese Patent application JP 2018-100819 filed on May 25, 2018, entitled “MANUFACTURING METHOD OF CERAMIC ELECTROSTATIC CHUCK”, the contents of which is hereby incorporated by reference in its entirety for all purposes.BACKGROUND OF THE INVENTIONTechnical Field[0002]The present invention involves a manufacturing method of a ceramic electrostatic chuck, and particularly involves a manufacturing method of a ceramic electrostatic chucks used in fabrication of semiconductor or liquid crystal display (LCD) panels.Description of the Prior Art[0003]Conventional methods for manufacturing ceramic electrostatic chucks generally includes: laminating and sintering green sheets as well as green sheets printed with high-melting metal (e.g., tungsten or molybdenum) paste for electrode formation; and sintering (such as hot-pressing) high-melting metal (e.g., tungsten or molybdenum) plates for electrode forma...
Claims
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Login to View More IPC IPC(8): C04B35/622B32B18/00
CPCC04B2235/77C04B2235/608B32B18/00H01L21/6833C04B35/622H01L21/6831H01L21/68785C04B2237/72C04B2237/704C04B2237/64C04B2237/68C04B2237/343C04B2237/34C04B2237/366C04B2237/368C04B2237/708C04B37/003H01L21/6835H02N13/00B23Q3/15C04B37/00
Inventor MATSUBARA, MANABU
Owner BLUE OCEAN RES & NETWORK LTD