Semiconductor device with a rewiring level and method for producing the same
a technology of rewiring level and semiconductor device, which is applied in the direction of semiconductor device, semiconductor/solid-state device details, electrical apparatus, etc., can solve the problems of increasing impedance and reducing clock frequency, chip stacks are not suitable, and disadvantages have even more horrendous effects, so as to reduce the inductance of the integrated circuit
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second embodiment
[0020]According to the invention, a chip stack of semiconductor chips is provided comprising a first semiconductor chip and at least one stacked second semiconductor chip. The semiconductor chips include active upper sides with signal contact areas and ground or supply contact areas. In addition, at least one of the two semiconductor chips bears a special rewiring level, which includes an insulating layer, a rewiring layer and a covering level. The insulating layer is applied to the active upper side, while leaving the signal contact areas and the ground or supply contact areas of the semiconductor chip free.
[0021]The rewiring layer on at least the second semiconductor chip is patterned in such a way that it contacts the signal contact areas and the ground or supply contact areas by corresponding rewiring lines. In addition, the rewiring layer includes in a peripheral region of the rewiring level signal connection contact areas and ground or supply connection contact areas, which ar...
third embodiment
[0029]the invention provides that the rewiring level on the stacked semiconductor chips is patterned in such a way that initially an insulating layer is again arranged on the active upper sides of the semiconductor chips. The rewiring layer has signal conductor paths that mainly run parallel and are arranged next to one another, between which no ground or supply conductor paths are arranged. Furthermore, the covering level is multilayered and patterned in such a way that initially a covering insulating layer is arranged on the rewiring layer and the entire semiconductor chip is covered or protected by an electrically conducting layer on the covering insulating layer. This electrically conducting layer lies at ground or supply potential.
[0030]In such an arrangement, the signal lines are separated from the ground or supply potential only by the thickness of the covering insulating layer. Consequently, the area of the induction loop for each of the signal lines is extremely small, wher...
first embodiment
[0056]FIG. 2 shows a schematic cross-section through a semiconductor device 30 according to the invention. This semiconductor device 30 includes a plastic package 41, in the plastic package molding compound 33 of which a semiconductor chip 1 is embedded with its back side 42 and its peripheral sides 43 and 44. The semiconductor chip 1 includes on its active upper side 4 a central bonding channel 28, in which rows of signal contacts with signal contact areas 6 are arranged. The active upper side 4 is fixed on a rewiring level 8 by a double-sided adhesive 45.
[0057]The rewiring level 8 includes a bonding channel opening 46 and is composed of four layers. The first layer is an electrically conducting layer 18 of metal, which covers the entire rewiring level 8 and is connected by contact vias 25 to a ground or supply potential, which can be connected to the external contacts 47.
[0058]As the second layer, the rewiring level 8 includes an insulating layer 9, which likewise has the bonding ...
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