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Semiconductor device with a rewiring level and method for producing the same

a technology of rewiring level and semiconductor device, which is applied in the direction of semiconductor device, semiconductor/solid-state device details, electrical apparatus, etc., can solve the problems of increasing impedance and reducing clock frequency, chip stacks are not suitable, and disadvantages have even more horrendous effects, so as to reduce the inductance of the integrated circuit

Inactive Publication Date: 2008-03-18
INFINEON TECH AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The solution significantly reduces inductive impedance, enabling operation at gigahertz clock frequencies and meeting DDR-III requirements, while ensuring high performance and low transit time differences for DDR-II memory devices, even when stacking identical semiconductor chips.

Problems solved by technology

With desired clock frequencies in the gigahertz range, high speeds are expected in the semiconductor chips, unattainable with conventional bonding pad arrangements in the form of rows of signal contact areas in a central bonding channel, especially since the long rewiring lines from the central bonding channel to the peripheral sides of the memory chips have excessively high inductance values, which increase the impedance and reduce the clock frequencies.
These disadvantages have even more horrendous effects when it is attempted to stack such semiconductor chips of an identical type.
For rapid access to memory data of the semiconductor chips with clock frequencies in the gigahertz range, as in the case of DDR-II (Double Data Rate II) or DDR-III (Double Data Rate III) memory chips, chip stacks are not suitable.
The stacking has the effect that such semiconductor devices with a semiconductor chip stack do not achieve the “high performance” criteria for DDR-II or DDR-III memory devices and therefore have until now only allowed themselves to be stacked by sacrificing “high performance”, which leads to unacceptable values with respect to the criteria of DDR-II devices.

Method used

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  • Semiconductor device with a rewiring level and method for producing the same
  • Semiconductor device with a rewiring level and method for producing the same
  • Semiconductor device with a rewiring level and method for producing the same

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second embodiment

[0020]According to the invention, a chip stack of semiconductor chips is provided comprising a first semiconductor chip and at least one stacked second semiconductor chip. The semiconductor chips include active upper sides with signal contact areas and ground or supply contact areas. In addition, at least one of the two semiconductor chips bears a special rewiring level, which includes an insulating layer, a rewiring layer and a covering level. The insulating layer is applied to the active upper side, while leaving the signal contact areas and the ground or supply contact areas of the semiconductor chip free.

[0021]The rewiring layer on at least the second semiconductor chip is patterned in such a way that it contacts the signal contact areas and the ground or supply contact areas by corresponding rewiring lines. In addition, the rewiring layer includes in a peripheral region of the rewiring level signal connection contact areas and ground or supply connection contact areas, which ar...

third embodiment

[0029]the invention provides that the rewiring level on the stacked semiconductor chips is patterned in such a way that initially an insulating layer is again arranged on the active upper sides of the semiconductor chips. The rewiring layer has signal conductor paths that mainly run parallel and are arranged next to one another, between which no ground or supply conductor paths are arranged. Furthermore, the covering level is multilayered and patterned in such a way that initially a covering insulating layer is arranged on the rewiring layer and the entire semiconductor chip is covered or protected by an electrically conducting layer on the covering insulating layer. This electrically conducting layer lies at ground or supply potential.

[0030]In such an arrangement, the signal lines are separated from the ground or supply potential only by the thickness of the covering insulating layer. Consequently, the area of the induction loop for each of the signal lines is extremely small, wher...

first embodiment

[0056]FIG. 2 shows a schematic cross-section through a semiconductor device 30 according to the invention. This semiconductor device 30 includes a plastic package 41, in the plastic package molding compound 33 of which a semiconductor chip 1 is embedded with its back side 42 and its peripheral sides 43 and 44. The semiconductor chip 1 includes on its active upper side 4 a central bonding channel 28, in which rows of signal contacts with signal contact areas 6 are arranged. The active upper side 4 is fixed on a rewiring level 8 by a double-sided adhesive 45.

[0057]The rewiring level 8 includes a bonding channel opening 46 and is composed of four layers. The first layer is an electrically conducting layer 18 of metal, which covers the entire rewiring level 8 and is connected by contact vias 25 to a ground or supply potential, which can be connected to the external contacts 47.

[0058]As the second layer, the rewiring level 8 includes an insulating layer 9, which likewise has the bonding ...

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PUM

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Abstract

A semiconductor device includes a plastic package, at least one semiconductor chip and a rewiring level. The rewiring level includes an insulating layer and a rewiring layer. The rewiring layer includes either signal conductor paths and ground or supply conductor paths arranged parallel to one another and alternately, or only signal conductor paths arranged parallel to one another. In the latter case, an electrically conducting layer of metal which can be connected to ground or supply potential is additionally provided as a termination of the rewiring level or in the form of a covering layer.

Description

CROSS REFERENCE TO RELATED APPLICATIONS[0001]This application is a continuation of PCT / DE2004 / 001853, filed Aug. 19, 2004, and titled “Semiconductor Device With a Rewiring Level and Method for Producing the Same,” which claims priority to German Application No. DE 103 39 762.0, filed on Aug. 27, 2003, and titled “Semiconductor Device With a Rewiring Level and Method for Producing the Same,” the entire contents of which are hereby incorporated by reference.FIELD OF THE INVENTION[0002]The present invention relates to a semiconductor device with a plastic package, with at least one semiconductor chip and with a rewiring level, and also to a method for producing the same.BACKGROUND[0003]Graphic memory devices are ahead of standard memory devices in terms of their electrical requirements. With desired clock frequencies in the gigahertz range, high speeds are expected in the semiconductor chips, unattainable with conventional bonding pad arrangements in the form of rows of signal contact ...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): H01L23/48H01L23/13H01L23/31H01L23/49H01L23/498H01L23/50H01L23/552H01L23/66H01L25/065
CPCH01L23/13H01L23/3114H01L23/49838H01L23/50H01L23/552H01L23/66H01L24/33H01L24/49H01L25/0657H01L23/49816H01L2223/6627H01L2224/32145H01L2224/32225H01L2224/48091H01L2224/4813H01L2224/48227H01L2224/48235H01L2224/4824H01L2224/48465H01L2224/48471H01L2224/49H01L2224/73215H01L2224/73265H01L2225/0651H01L2225/06527H01L2225/06541H01L2225/06575H01L2225/06582H01L2924/01004H01L2924/01005H01L2924/01006H01L2924/0101H01L2924/01013H01L2924/01032H01L2924/01052H01L2924/01075H01L2924/01078H01L2924/01079H01L2924/01082H01L2924/14H01L2924/15311H01L2924/16195H01L2924/1903H01L2924/19043H01L2924/30107H01L2924/3011H01L2924/3025H01L24/48H01L2924/01033H01L2924/01068H01L2924/014H01L2924/12041H01L2224/06135H01L2224/06136H01L2924/00014H01L2924/00H01L2924/00012H01L2224/451H01L2924/30111H01L2924/181H01L24/45H01L24/73H01L2224/45099
Inventor GOSPODINOVA-DALTCHEVA, MINKAHUEBERT, HARRYSUBRAYA, RAJESHTHOMAS, JOCHENWENNEMUTH, INGO
Owner INFINEON TECH AG