Two-armed transfer robot

Abstract

A two-armed transfer robot includes a pair of double-pantograph mechanisms. These mechanisms are substantially symmetrical to each other with a vertical plane. Each double-pantograph mechanism includes a first pantograph assembly and a second pantograph assembly. The second pantograph assembly supports a handling member for carrying a workpiece to be processed. The second pantograph assembly is offset away from the vertical plane with respect to the first pantograph assembly. A rotation-transmitting mechanism is provided between the first and the second pantograph assemblies of each double-pantograph mechanism. Thus, the two pantograph assemblies of each double-pantograph mechanism are actuated in cooperation for linearly moving the handling member. The handling members of the respective double-pantograph mechanisms are vertically spaced from each other. The handling members are arranged not only to move linearly but to rotate simultaneously around a vertical axis.

Description

BACKGROUND OF THE INVENTION1. Field of the InventionThe present invention relates to a two-armed transfer robot useful for semi-conductor manufacturing equipment, liquid crystal display processing equipment and the like. More particularly, the present invention relates to a two-armed transfer robot for transferring workpieces between processing chambers under a vacuum.2. Description of the Related ArtIn general, transfer robots are used for semi-conductor manufacturing equipment, liquid crystal display processing equipment and the like. The robot has at least one arm mechanism provided with a handling member. An object to be processed or workpiece such as a silicon wafer is placed on the handling member. The arm mechanism is capable of moving horizontally in a straight line as well as rotating in a horizontal plane. A plurality of processing chambers for performing various kinds of processing are arranged around a rotation axis of the robot. With the use of the transfer robot, the w...

AI Technical Summary

Benefits of technology

It is, therefore, an object of the present invention to provide a compact, inexpensive two-armed transfer robot which is easy to operate and capable of providing good productivity.

With such an arrangement, the first to the third shafts are coaxially supported about a common vertical axis. Thus, the bearings and the seals provided around the respective shafts are made small in diameter. As a result, the overall size of the transfer robot is rendered relatively small as compared with the conventional robot. Accordingly, the price of the robot is reduced.

Further, according to the present invention, the pantograph assembly carrying a handling member is made advantageously small in thickness since there is no need to use the conventional rotation-transmitting member and connecting member described above Thus, the height H.sub.2 of the base portions of the respective handling members is reduced. Accordingly, the size of the insertion window or each processing chamber is also reduced.

Further, the first to the third driving devices are attached to the stationary base member. Therefore, unlike the conventional robot, there is no limitation to the rotational angle of the first and the second handling members around the first axis. Thus, the present invention serves to increase productivity.

Problems solved by technology

Therefore, the height H.sub.1 (see FIG. 15) of the arm mechanism is made unfavorably large.

This arrangement renders the rotation radius of the inner frame 81 unfavorably large.

Therefore, the price of the robot is rendered unduly high.

However, such additional devices make the robot expensive.

More importantly, the additional devices do not eliminate the limitation to the rotation angle.

Thus, the conventional robot is not only expensive but inconvenient to operate.

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