Method for fabricating super fine set of die for guiding light plate
A manufacturing method and light guide plate technology, applied in optics, nonlinear optics, microlithography exposure equipment, etc., can solve the problems of low pass rate, time-consuming and complicated process of depositing metal base 5, etc.
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[0019] Relevant detailed description and technical contents of the present invention are as follows now in conjunction with the accompanying drawings:
[0020] Please refer to FIG. 7 to FIG. 10 , which are cross-sectional views of making the mold core of the light guide plate at different steps according to the method of the present invention. The steps of the present invention include:
[0021] a. Form a non-metallic layer 20 with a specific pattern on the surface of a metal substrate 10 (as shown in FIG. 7 ), which is fabricated by a lithography process.
[0022] b. On the surface area of the metal substrate 10 that is not covered by the non-metallic layer 20, a metal layer 30 with a thickness not greater than the thickness of the non-metallic layer 20 is plated by electroplating or electroless plating (as shown in Figure 8) ; Due to the characteristics of electroplating or electroless plating process, it can only deposit metal on the surface of metal, so it can only depos...
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