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Piezoelectric element and liquid nozzle

A technology of piezoelectric elements and piezoelectric layers, which is applied in the direction of electrical elements, piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., and can solve the problems that piezoelectric films are easily damaged

Inactive Publication Date: 2008-04-30
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, when a voltage is applied to the piezoelectric film, damage such as cracks may occur
Especially the piezoelectric film in the area corresponding to the end of the lower electrode in the length direction is easily damaged

Method used

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  • Piezoelectric element and liquid nozzle
  • Piezoelectric element and liquid nozzle
  • Piezoelectric element and liquid nozzle

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0040] figure 1 is a schematic configuration diagram of a printer (an example of a liquid ejection device) using an inkjet type recording head (an example of a liquid ejection head) having a piezoelectric element manufactured by the method of this embodiment. In this printer, a tray 3 , a discharge port 4 , and operation buttons 9 are provided on a main body 2 . In addition, the main body 2 has an inkjet recording head 1 , a paper feeding mechanism 6 , and a control circuit 8 .

[0041] The ink jet recording head 1 has a piezoelectric element manufactured by the manufacturing method of the present invention. The inkjet recording head 1 can eject ink from the nozzles in response to an ejection signal supplied from the control circuit 8 .

[0042] The main body 2 is a frame of the printer, and a paper feeding mechanism 6 is arranged at a position where paper 5 can be supplied from a tray 3 , and an inkjet recording head 1 is arranged so as to print on paper 5 . The tray 3 is ...

no. 2 approach

[0072] Figure 8 is a schematic exploded perspective view showing the recording head in the second embodiment, Figure 9 yes Figure 8 plan and B-B' section, Figure 10 It is a schematic diagram showing the layer structure of the piezoelectric element. In addition, the same code|symbol is attached|subjected to the same member as the member demonstrated in 1st Embodiment, and overlapping description is abbreviate|omitted.

[0073] This embodiment mode is another example of the layer structure of the piezoelectric element, specifically, as Figure 8 ~ Figure 10 As shown, the lower electrode films 60A constituting the piezoelectric element 300 are respectively patterned in the vicinity of both end portions of the pressure generating chambers 12 , and are continuously arranged along the parallel arrangement direction of the pressure generating chambers 12 . In addition, in the present embodiment, the end surface of the lower electrode film 60A in the region facing each pressur...

no. 3 approach

[0093] Figure 16 It is a plan view and a cross-sectional view of the ink jet recording head in the third embodiment.

[0094] This embodiment is an example in which a metal layer is provided on the vibrating film near the end of the piezoelectric film 70A, and is the same as the second embodiment except that the metal layer is provided. Specifically, as Figure 16 As shown, a metal layer 61 formed of the same layer as the lower electrode film 60A but not electrically conductive with the lower electrode film 60A is provided near the longitudinal end of the piezoelectric film 70A. In addition, the piezoelectric films 70A extend to a part of these metal layers 61 .

[0095] In addition, in the present embodiment, the metal film 61A provided near the end portion of the piezoelectric film 70A on the guide electrode 90 side is separately provided for each piezoelectric element, and the guide electrode is extended on the metal layer 61A. 90. On the other hand, the metal layer 61...

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PUM

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Abstract

Provided are a piezoelectric element in which favorable crystallinity canbe obtained with improved uniformity, breakage of a piezoelectric film can be prevented, and thereby stable displacement properties can be obtained, a liquid-j et head using the piezoelectric element and a manufacturing method thereof. Steps of forming a piezoelectric layer are carried out a plurality of times so that a plurality of the piezoelectric layers are stacked, thus forming the piezoelectric film. The steps of forming the piezoelectric layer include: applying a sol containing an organometallic compound, drying the sol containing the organometallic compound, degreasing the sol containing the organometallic compound thus gelating the sol, and crystallizing the gelated organometallic compound. When forming a lowermost layer of the piezoelectric layers, a rate of temperature increase at least during initial degreasing is set to be 500 DEG C / min or lower.

Description

technical field [0001] The present invention relates to a piezoelectric element and a liquid ejection head using the piezoelectric element, in particular to a method for manufacturing a piezoelectric element capable of uniform crystal orientation on a wafer plane and uniform piezoelectric characteristics. Background technique [0002] A piezoelectric element is an element in which a piezoelectric film exhibiting an electromechanical conversion function is sandwiched between two electrodes, and the piezoelectric film is composed of crystallized piezoelectric ceramics. [0003] Conventionally, a so-called sol-gel method has been known as a method for manufacturing a piezoelectric element. That is, the sol of the organometallic compound is coated on the substrate on which the lower electrode is formed, dried and degreased to form a precursor of the piezoelectric body. After performing this coating, drying, and degreasing process a predetermined number of times, heat treatment ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/083H01L41/09H01L41/24B41J2/16H01L41/318H01L41/39
CPCH01L41/39B41J2/161H01L41/0973H01L41/0926B41J2/1628B41J2002/14419B41J2/1623B41J2002/14241H01L41/318B41J2002/14491H01L41/1876B41J2/1645H10N30/2047H10N30/8554H10N30/078
Inventor 村井正己
Owner SEIKO EPSON CORP
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