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Super definition continuously adjustable iris filter

A pupil filter and super-resolution technology, applied in the field of optical super-resolution, can solve problems such as the difficulty of crystal materials, and achieve the effects of wide adjustment range, small change amount, and high adjustment accuracy

Inactive Publication Date: 2008-12-10
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the case of a wavelength of 589nm, he can adjust the spot compression ratio between [0.808~1], but it is difficult to process crystal materials with a center-edge wavelength difference of half a wavelength and a certain radius of curvature.

Method used

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  • Super definition continuously adjustable iris filter
  • Super definition continuously adjustable iris filter
  • Super definition continuously adjustable iris filter

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Embodiment Construction

[0020] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0021] figure 1 It is a simplified structural diagram of the continuously adjustable super-resolution pupil filter of the present invention. The structure of the super-resolution continuously adjustable pupil filter of the present invention is composed of four parts, a polarizer 1 , a circularly symmetrical two-zone binary pupil filter 2 , a polarizer 3 and a casing 4 . Among them, the polarizer 1, the circularly symmetrical two-zone binary pupil filter 2 and the polarizer 3 are sequentially placed on the same main axis (OO'), the polarizer 1 and the polarizer 3 are fixed relative to the housing, and the circularly symmetrical two The block binary pupil filter 2 is fixed to the housing 4 by two points. The polarization directions of the polarizer 1 and the analyzer 3 are ...

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Abstract

A super-resolution continuously adjustable pupil filter is characterized in that the pupil filter includes a polarizer, a circularly symmetrical two-zone binary pupil filter and an analyzer arranged sequentially on the same main axis. The polarizer and the analyzer are fixed relative to a housing, the circularly symmetrical two-zone binary pupil filter is fixed to the housing by two points, and the polarization directions of the polarizer and the analyzer are parallel. The filter of the invention has the characteristics of higher adjustment precision, larger viewing angle, wider adjustment range, easy processing and convenient use.

Description

technical field [0001] The invention relates to optical super-resolution technology, which is a super-resolution continuously adjustable pupil filter, which can be widely used in optical imaging systems and beam focusing and scanning systems, and can also be used for the detection of far-field diffraction spots of laser beams in space optical communications. compression. Background technique [0002] In recent years, with the development of communication and various optical technologies, there are more and more requirements for optical super-resolution technology. In microelectronics processing, lithography, confocal microscope scanning and optical storage technology, it is hoped to obtain a focused spot smaller than the Airy disk. According to the classical diffraction limit D = λ 2 NA , Among them, λ is the wavelength of the incident light, and NA is the numerical aper...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/00G02F1/01G02B5/20G02B27/28
Inventor 朱化凤陈建文高鸿奕干慧菁李儒新徐至展
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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