Miniature mechanical three-axis angular rate sensor

Abstract

The invention relates to the sensor used to measure three-axial direction angular rate for rotating substance. It includes X, Y, Z three space axial angle rate sensors each of which is made up of ST self test interface circuit, sensing element circuit, charge pump booster circuit, demodulation filter circuit, and output amplifying circuit. The output of the self test interface and charge pump circuit are respectively connected with the input of the sensing element circuit of which output is connected with output amplifying circuit by demodulation filter circuit. Angle rate sensor based on resonator gyro principle uses sensing element formed by MEMS technique chip to receive electrical signal caused by Cuneo sport for the substance with angle rate. The electrical signal is processed by demodulation filter circuit and output amplifying circuit to output analogue signal which be in direct proportion to angle rate to corresponding micro processor. The product has the advantages of reasonable structure, convenient operation, little size, low fabricating cost, wide application in inertia measurement, vehicle stabilization control, strap down INAS fields etc.

Description

Technical field [0001] The content of the present invention belongs to the technical field of inertial measurement devices, and relates to an angular rate sensor that can measure three axial angular rates of rotating objects. Its products can be widely used in inertial measurement systems, stable platforms, missile guidance and control, and aerospace vehicles. Stability control, strapdown inertial navigation, automotive electronics, antenna tuning, digital photography gyro and robot control and other industries. Background technique [0002] At present, most of the angular rate sensors commonly used in the above-mentioned industries are mechanical, such as liquid floating or semi-liquid floating, flexible angular rate sensors with rotating motors, etc. These old-fashioned angular rate sensors are used in practical applications. The outstanding disadvantages are large size, high price, easy damage, low impact acceleration resistance, short life, small measurement range (up to...

AI Technical Summary

Problems solved by technology

[0002] At present, most of the angular rate sensors commonly used in the above-mentioned industries are mechanical, such as liquid floating or semi-liquid floating, flexible angular rate sensors with rotating motors, etc. These old-fashioned angular rate sensors are used in practical applications. The outstanding disadvantages are large size, high price, easy damage, low impact acceleration resistance, short life, small measurement range (up to 500° / s), low frequency response (up to 100HZ) and lack of self-testing (Self -Test) function, etc.

Among the above disadvantages: large size, which limits the installation and application of the product; expensive (mostly more than 20,000 yuan), which is unbearable for ordinary users; easy to damage because the old-fashioned angular rate sensors have high-speed rotating motors and High-precision frame, these rotating parts are easily damaged; the reason for the low impact acceleration is that the rotating motor is a precision device that is not easily affected by impact, and the internal sensitive component (pick-off) will shift after a large impact, affecting the accuracy The short life is mainly caused by the wear and tear of the movable parts; and the lack of the self-test (Self-Test) function means that in the control system using the mechanical angular rate sensor, the BIT (Built-in- Test) function

Even today's more advanced optical fiber or laser angular rate sensors are difficult to be widely used due to their high price and large size

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