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Method for manufacturing electro-optic device, electro-optic device and electronic apparatus

An electro-optical device and a manufacturing method, which are applied to electroluminescence light sources, optics, and electric light sources, etc., can solve problems such as deterioration of light-emitting layers and adverse effects of organic EL materials.

Inactive Publication Date: 2009-03-18
SEIKO EPSON CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, if the cathodic protection layer and the gas barrier layer are formed by a plasma film-forming method such as a high-density plasma film-forming method, the energy of ions and electrons in the generated plasma is transferred to the cathode due to conductivity, which has a negative effect on the formation of luminescence. The organic EL material of the layer has a bad influence, causing the problem of deteriorating the light-emitting layer

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  • Method for manufacturing electro-optic device, electro-optic device and electronic apparatus
  • Method for manufacturing electro-optic device, electro-optic device and electronic apparatus
  • Method for manufacturing electro-optic device, electro-optic device and electronic apparatus

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Embodiment Construction

[0031] Hereinafter, embodiments of the manufacturing method of the electro-optical device, the electro-optical device, and the electronic device of the present invention will be described with reference to the drawings. As an electro-optical device, an EL display device using an organic electroluminescent (EL) material, which is an electroluminescence type material as an example of an electro-optical material, will be described.

[0032] figure 1 The wiring structure of the EL display device 1 is shown. The EL display device 1 is an active matrix type EL display device using a thin film transistor (Thin Film Transistor, hereinafter abbreviated as TFT) as a switching element.

[0033] EL display device (electro-optical device) 1 such as figure 2 As shown, it is composed of a plurality of scanning lines 101, a plurality of signal lines 102 extending in a direction crossing each scanning line 101 at right angles, and a plurality of power supply lines 103 extending in parallel ...

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Abstract

The invention relates to a manufacture method of an electro-optical device, an electro-optical device and an electronic machine. The base (200) of the electro-optical device (1) is provided with a first electrode (23), a second electrode (50) and an electro-optical layer clamped between the first electrode (23) and the second electrode (50). The manufacture method of the electro-optical device (1) comprises a working process which prepares the luminescent material protective layer coating the second electrode (50) by the vacuum evaporation plating method and a working process which prepares the electrode protective layer of the luminescent material protective layer by the plasma film forming method. The manufacture method has an advantage that the deterioration of luminescent layer produced during the manufacture process can be avoided.

Description

technical field [0001] The present invention relates to a method of manufacturing an electro-optical device, an electro-optical device, and an electronic device. Background technique [0002] In the field of electro-optical devices, improvement of durability against oxygen, moisture, and the like is a subject. For example, in an organic electroluminescent (hereinafter abbreviated as organic EL) display device as an example of the electro-optical device, there is such a phenomenon due to the electro-optical material (organic EL material, hole) constituting the light-emitting layer (electro-optical layer). Injection materials, electron injection materials, etc.) are deteriorated by oxygen and moisture, etc., and the resistance value of the cathode is increased by oxygen and moisture, etc., resulting in non-luminous regions called black spots, which shorten the life of light-emitting elements. [0003] In order to solve the above-mentioned problems, a method of attaching a gla...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/32H01L51/50H05B33/10G02B6/00G09F9/00G09F9/30H01L51/52H05B33/04H05B33/12H05B33/14H05B33/22H05B33/26
CPCH01L27/1214H01L51/5237H10K59/873H05B33/10H05B33/22H10K50/84H10K50/844
Inventor 林建二柄泽康史
Owner SEIKO EPSON CORP