Straight-line organic electroluminescence mfg. device

Abstract

In the manufacturing device of the in-line type organic electroluminescent element, a holder integrated with a mask is used to retain a substrate, to which a cooling plate is fitted to suppress temperature rise of the substrate and continuous conveyance is carried out. Further, a structure is realized in which the substrate is continuously conveyed without stop between treatment rooms of different degrees of vacuum, with differential exhaust parts D1 to D4 provided inside the device. So that, this invention provides a manufacturing device of an in-line type electroluminescent element with improved film-forming quality and high production efficiency.

Description

technical field [0001] The invention relates to an inline organic electroluminescent manufacturing device, which continuously transports substrates, evaporates evaporation materials such as organic materials, and forms organic electroluminescent (hereinafter referred to as EL) elements. Background technique [0002] Fig. 10 shows an organic EL manufacturing apparatus commonly used at present. [0003] The apparatus shown in FIG. 10 is a so-called cluster type apparatus, in which a plurality of transfer chambers having robots has a polygonal shape, and a plurality of processing chambers are provided around the transfer chamber. As shown in FIG. 10, an organic EL manufacturing device 40 has a film forming process unit 41 having: a transport chamber 42 for transporting substrates to each processing chamber; a substrate inlet 43 for transporting the substrate into the transport chamber; a cleaning chamber 44 for cleaning the substrate; Film formation chambers 45 , 46 , and 47 f...

AI Technical Summary

Problems solved by technology

However, the cluster-type organic EL manufacturing device shown in Figure 10 has such a problem: there is an independent processing chamber for each thin film, and each processing chamber needs to send the substrate in and out, and it is necessary to adjust the temperature of each processing chamber. Vacuum level, and thus the required production time per substrate is very long

[0012] In addition, in the above-mentioned in-line organic EL manufacturing device, in the film-forming chamber for organic EL element film formation, such as on a belt conveyor, the substrate is continuously transported while forming a film, so positional deviation is prone to occur, especially large-scale Substrate, due to the bending of the substrate itself, it is prone to poor film quality

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