Straight-line organic electroluminescence mfg. device

A manufacturing device and luminescent technology, which is applied in the direction of electroluminescent light source, electric light source, lighting device, etc., can solve the problems of long substrate production time, position deviation, poor film quality, etc., and achieve high productivity and high-speed transportation Speed, the effect of suppressing the rise in temperature

CN100482850CActive Publication Date: 2009-04-29MITSUBISHI HEAVY IND LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2009-04-29

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Abstract

In the manufacturing device of the in-line type organic electroluminescent element, a holder integrated with a mask is used to retain a substrate, to which a cooling plate is fitted to suppress temperature rise of the substrate and continuous conveyance is carried out. Further, a structure is realized in which the substrate is continuously conveyed without stop between treatment rooms of different degrees of vacuum, with differential exhaust parts D1 to D4 provided inside the device. So that, this invention provides a manufacturing device of an in-line type electroluminescent element with improved film-forming quality and high production efficiency.
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Description

technical field

[0001] The invention relates to an inline organic electroluminescent manufacturing device, which continuously transports substrates, evaporates evaporation materials such as organic materials, and forms organic electroluminescent (hereinafter referred to as EL) elements. Background technique

[0002] Fig. 10 shows an organic EL manufacturing apparatus commonly used at present.

[0003] The apparatus shown in FIG. 10 is a so-called cluster type apparatus, in which a plurality of transfer chambers having robots has a polygonal shape, and a plurality of processing chambers are provided around the transfer chamber. As shown in FIG. 10, an organic EL manufacturing device 40 has a film forming process unit 41 having: a transport chamber 42 for transporting substrates to each processing chamber; a substrate inlet 43 for transporting the substrate into the transport chamber; a cleaning chamber 44 for cleaning the substrate; Film formation chambers 45 , 46 , and 47 f...

Examples

Embodiment 1

[0057] figure 1 , figure 2 An embodiment of the holder used in the in-line organic EL manufacturing apparatus of the present invention is shown.

[0058] in addition, figure 1 (a), figure 2 (a) is a perspective view of the substrate and support, figure 1 (b), figure 2 (b) represent respectively figure 1 (a) A-A line view sectional view, figure 2 (a) The sectional view taken along the line B—B.

[0059] Such as figure 1 As shown, the stand 1A (supporting device) has a frame 3a with an L-shaped cross-section supporting the peripheral portion of a rectangular substrate 2a from its lower side, and a cross-shaped central portion of the frame 3a that supports the rectangular substrate 2a from its lower side. The supporting member 4a is provided with a mask 5a for forming a film pattern to be formed in the opening portion formed by the frame 3a and the cross-shaped supporting member 4a. In addition, the support member 4a is not limited to a cross shape, For example, ther...