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Process system and device for transporting substrates

A process system and substrate technology, applied in the field of process systems, can solve problems such as unstable rotor dynamics, and achieve the effect of flexibility and easy adaptation

Inactive Publication Date: 2009-07-22
LEYBOLD OPTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Process stabilization of the magnetic support in the known system Adjustment due to structurally unstable rotor dynamics is complex

Method used

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  • Process system and device for transporting substrates
  • Process system and device for transporting substrates
  • Process system and device for transporting substrates

Examples

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Embodiment Construction

[0027] figure 1 A schematic screenshot of a coating process line with process cavities P1, P2, P3 and gates S1, S2, S3, S4 and a transport line T is shown, where the transport line T is interrupted. The process chambers P1, P2, P3 may be purification chambers, plasma processing chambers, pickling chambers, coating chambers, heating chambers, etc. In the process chamber P1, the substrate 23 is fixed on the device according to the invention by means of a carrier 14, wherein the device includes at least one supporting module with a supporting stator and an active magnetic supporting rotor and a driving module. It goes without saying that the active magnetic support is provided with a distance sensor for the adjustment device, but it is not shown in the figure for the sake of simplifying the view.

[0028] The supporting module has a supporting stator with an exciter configured as an electromagnet and a supporting rotor with a ferromagnetic member. According to the present invention,...

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PUM

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Abstract

In the process system according to the invention, an actuator pair with an associated gap area is formed by at least two actuators arranged at a distance from one another, wherein an active magnetic support for supporting the rotor is arranged in the gap area, wherein the The process system has a device for transporting substrates (23) on a transport line (T), wherein the device has a support module and a drive module, and the support module has a support stator with an exciter configured as an electromagnet and a supporting rotor with ferromagnetic components.

Description

Technical field [0001] The invention relates to a process system and a device for conveying substrates. Background technique [0002] For the manufacture of optical displays, increasingly larger substrates are required. This type of display is mainly used in small and medium-sized display systems, such as mobile phones, DVD players, notebooks, televisions, car radios, or industrial applications. At present, liquid crystal displays occupy the mainstream with a share of more than 80%, while the manufacturing method of plasma displays as an alternative currently occupies a share of 15%, and an organic light-emitting diode currently occupies a share of 2%. Especially for the manufacturing method described as an alternative, in order to achieve a high degree of uniformity of the surface treatment, especially the coating of the substrate, higher and higher requirements are put forward for process reliability, where the coating of the substrate varies with With the increasing size of th...

Claims

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Application Information

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IPC IPC(8): H01L21/677B65G54/02
CPCB65G54/02
Inventor M·勒德A·卡斯帕里C·克勒森
Owner LEYBOLD OPTICS
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