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Method and device of light splitting, image-forming and synchronous phase-shifting in optical interferometry

A technology of optical interference and synchronous phase shifting, applied in measuring devices, optical devices, optical radiation measurement, etc., can solve the problems of high cost and high manufacturing process requirements, and achieve the effect of convenient purchase, simple measurement process and simple method

Inactive Publication Date: 2009-10-21
NANJING NORMAL UNIVERSITY
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Problems solved by technology

However, due to the use of golden interest gratings for light splitting, in order not to appear unnecessary diffracted light and not to change the wavefront of incident light, the requirements for the grating manufacturing process are relatively high, so the overall cost of this type of interferometer is relatively high

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  • Method and device of light splitting, image-forming and synchronous phase-shifting in optical interferometry
  • Method and device of light splitting, image-forming and synchronous phase-shifting in optical interferometry
  • Method and device of light splitting, image-forming and synchronous phase-shifting in optical interferometry

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Embodiment

[0015] Example: such as figure 1 As shown, the main body of the light splitting, imaging and synchronous phase shifting device in the optical interferometry of the present invention is a Twyman-Green type laser plane interferometer, and the laser light source 1 used is a frequency-stabilized laser that outputs a polarized laser beam, and the laser beam expands the beam After system 2, a linearly polarized plane light source is obtained, and the linearly polarized plane light source passes through the half-wave plate 3 and is divided into two parts of linearly polarized light whose polarization directions are perpendicular to each other by the polarization beam splitter prism 4 . Wherein the linearly polarized light reflected by the polarization beam splitter 4 passes through the quarter-wave plate 8 and projects to the standard reference mirror 7, and passes through the quarter-wave plate 8 again after returning, so that the linearly polarized light reflected by the polarizatio...

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Abstract

The invention discloses a method for light splitting, imaging and synchronous phase shifting in optical interferometry: the polarized laser beam output by a laser light source is expanded to obtain a linearly polarized plane light source, and then enters a plane polarized light interference system to obtain a test wave surface An interference field that is co-beamed with the reference wave surface and whose polarization directions are perpendicular to each other. The interference field beam is divided into four beams with uniform spatial distribution and uniform intensity after passing through a quarter-wave plate and a combined prism beam splitting system. The four beams pass through the analyzer After that, it is projected onto the CCD target surface, so that four interference fringe patterns with a phase shift of 90 degrees can be obtained after one high-speed sampling. At the same time, a device for implementing the method is also disclosed. The method and device of the invention have clear principle, simple method and miniaturization of the device. The on-site dynamic measurement of high-precision optical interference is realized, and the measurement process is simpler and more convenient.

Description

technical field [0001] The invention relates to a dynamic interferometry method and device in the field of optical wavefront detection, in particular to a method and device for light splitting, imaging and synchronous phase shifting in optical interferometry. Background technique [0002] In optical wavefront interferometry, the laser is usually used as a coherent light source, and two wavefronts are generated by dividing the amplitude. One wavefront is projected to the standard reference mirror and returned to form a reference wavefront, and the other wavefront is projected to the device under test and returned to form a reference wavefront. The test wavefront, the reference wavefront and the test wavefront meet in space to form an interference field, and the digital image acquisition device records the interference field in the form of an interference fringe pattern, and the shape of the test wavefront can be obtained by analyzing the interference fringe pattern. At presen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02G01J9/02
Inventor 吴栋聂守平冯少彤
Owner NANJING NORMAL UNIVERSITY
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