Optical device, wave length variable filter, wave length variable filter module and spectral analysis device

An optical device and wavelength technology, applied in the field of spectrum analyzer, can solve problems such as higher driving voltage, larger coupling capacitance, and difficult detection

Inactive Publication Date: 2007-07-25
SEIKO EPSON CORP
View PDF1 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the variable wavelength filter of Patent Document 1, since the surface of the supporting substrate on the side of the movable part is a plane, the detection electrodes and the drive electrodes must be placed on the same plane. If the distance between the drive electrodes and the detection electrodes is small, , the coupling capacitance generated between them becomes lar...

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Optical device, wave length variable filter, wave length variable filter module and spectral analysis device
  • Optical device, wave length variable filter, wave length variable filter module and spectral analysis device
  • Optical device, wave length variable filter, wave length variable filter module and spectral analysis device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0092] Hereinafter, the optical device, variable wavelength filter, variable wavelength filter module, and spectrum analyzer of the present invention will be described in detail based on preferred embodiments shown in the drawings.

[0093] 1 is an exploded perspective view showing an embodiment of the optical device of the present invention, FIG. 2 is a top view of the optical device shown in FIG. 1 , FIG. 3 is a cross-sectional view along line A-A of FIG. 5 is a block diagram showing the configuration of the control system of the optical device shown in FIG. 1 . In addition, in the following description, the upper side in FIG. 1 is referred to as "upper" and the lower side is referred to as "lower". "Down", "Right" for the right side, "Left" for the left side, "Up" for the upper side in Figure 3, "Down" for the lower side, "Right" for the right side, and "Left side" for the left side.

[0094] The optical device 1 shown in FIG. 1 is, for example, a variable wavelength filte...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

An optical device includes a movable portion and a fixed portion having a first light reflection portion. The movable portion has a second light reflection portion facing the first light reflection portion with a first gap. The first and second light reflection portions are configured to reflect light repeatedly between the first and second light reflection portions so as to cause interference and emit light having a wavelength corresponding to a size of the first gap. The optical device also includes a first electrode portion fixed to the fixed portion so as to face a surface of the movable portion near the first light reflection portion with a second gap between the movable portion and the first electrode portion. The optical device has a second electrode portion fixed to the fixed portion so as to face another surface of the movable portion with a third gap between the movable portion and the second electrode portion. One of the first and second electrode portions serves as a detection electrode for detecting a capacitance between the movable portion and the detection electrode. Another of the first and second electrode portions serves as a drive electrode. The optical device includes a circuit operable to generate a potential difference between the movable portion and the drive electrode so as to generate an electrostatic attraction force therebetween for changing a position and/or a posture of the movable portion.

Description

technical field [0001] The invention relates to an optical device, a variable wavelength filter, a variable wavelength filter module and a spectrum analyzer. Background technique [0002] As an optical device, for example, a wavelength tunable filter (Optical Tunable Filter) for separating only light of a specific wavelength from light having a plurality of wavelengths is known (for example, refer to Patent Document 1). [0003] For example, the variable wavelength filter of Patent Document 1 is in the shape of a plate, and the movable part displaceable in the thickness direction thereof is arranged approximately parallel to the supporting substrate, and the surface of the movable part on the supporting substrate side is in contact with the supporting substrate. Reflective films are respectively provided on the surfaces (opposite surfaces) on the side of the movable part. [0004] Also, the driving electrodes are provided on the support substrate, and a potential difference...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G02B26/00G02B1/11B81B3/00G01J3/26G02B5/28
Inventor 中村亮介
Owner SEIKO EPSON CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap