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Push-rod type non-leakage open-loop hydraulic system integrated with diaphragm and sealing ring

A technology of hydraulic system and sealing ring, applied in the direction of fluid pressure actuating device, diaphragm, servo motor, etc., can solve the problem that it is impossible to realize the precise control of the motion state and stroke of the micron or nano-scale motion work platform, and the motion control stroke is small. , piezoelectric ceramics are easy to break down, etc., to achieve the effect of small movement resistance, stable working state and simplified processing

Inactive Publication Date: 2007-08-01
张志宏
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Due to the complex structure of the transmission chain, the mechanical method will inevitably lead to a huge mechanism, which cannot be carried out in some fields with extremely high space requirements (such as biology, medicine, scientific research, military industry). At the same time, in order to reduce the cumulative error, the machining accuracy of parts and components requires Extremely high, it is impossible to realize the precise control of the motion state and stroke of the micron or nanoscale motion work platform
Piezoelectric ceramic micro-drive control has the characteristics of high control precision, but the motion control stroke is very small, and piezoelectric ceramics are easy to break down, which limits its application range

Method used

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  • Push-rod type non-leakage open-loop hydraulic system integrated with diaphragm and sealing ring

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Embodiment Construction

[0017] As shown in Figure 1, the present invention is composed of two parts: an actuator 1 and a control mechanism 2. The two parts have the same structure and are connected by an oil pipe 3. The actuator has a cylinder block 1-3 and a cylinder head 1-5, which are in the inner cavity of the cylinder. There are integrated diaphragms 1-4 that match the size of the inner wall of the cylinder. As shown in Figure 2, the integrated diaphragm 1-4 is composed of a barrel-shaped diaphragm 1-4.1 with an open end and an O-shaped sealing ring 1-4.2. The O-shaped sealing ring 1-4.2 is located on the barrel diaphragm 1-4.1 Open and join with diaphragm 1-4.1. The integrated diaphragm 1-4 is made of foldable flexible rubber material that does not chemically react with the fluid medium used, nor does it have physical infiltration with the fluid medium used, or other materials that meet the requirements for injection molding. . One end of the ejector rod 1-2 is close to the bottom of the barrel of ...

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Abstract

The invention discloses a controller on the state and strike of micrometer / nanometer platform, comprising an executor and a controller in same structure and connected via oil tube. The executor comprises a cylinder, a cover, a membrane in the cylinder and a top rod moving in the chamber of cylinder. The membrane comprises a film and sealing ring engaged with the chamber of cylinder while they are integrated. The invention has low resistance and medium leakage, to reduce the accuracy demand of system.

Description

Technical field [0001] The invention relates to a precise control and drive device for micron and nanometer-level motion states and strokes, in particular to a diaphragm and sealing ring integrated ejector rod type non-leakage open-loop hydraulic system. Background technique [0002] In the fields of bioengineering, medicine, agriculture, industry, military industry, scientific research, etc., micro- or nano-level motion work platforms are required to perform precise control of the motion state and precise control of the stroke. Generally, traditional hydraulic cylinder, mechanical or piezoelectric ceramic micro-drive control can be used. Because the traditional hydraulic cylinder method has high friction resistance and high parts processing precision, it is impossible to realize the precise control of the motion state and the precise control of the stroke of the micron or nanometer motion work platform. At present, most of them are controlled by mechanical means. Mechanical meth...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F15B9/02F16J3/02
Inventor 张志宏
Owner 张志宏