Piezoelectric actuator

A technology of actuators and piezoelectric elements, applied in the directions of electrical components, piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problem that the displacement characteristics of piezoelectric actuators cannot be fully solved. , large fluctuations, fluctuations and other issues

Inactive Publication Date: 2007-08-15
DENSO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there is a problem that the fluctuation amplitude of the displacement within the operating temperature range is larger than that of the above-mentioned constant voltage driving method and the above-mentioned co

Method used

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Examples

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Embodiment 1

[0270] Next, examples of the present invention will be described.

[0271] In this example, a piezoelectric element including piezoelectric ceramics was produced, and a piezoelectric actuator was produced using this piezoelectric element.

[0272] In this example, as a model of the piezoelectric actuator, a piezoelectric actuator 11 using a jig 8 is fabricated as shown in FIG. 37 .

[0273] That is, the piezoelectric actuator 11 of this example has a multilayer piezoelectric element 2 using piezoelectric ceramics as a driving source, and the piezoelectric element 2 is fixed by a jig 8 .

[0274]The jig 8 has a housing 81 for accommodating the piezoelectric element 2 , and a piston (connecting member) 82 connected to the piezoelectric element 2 and transmitting the displacement of the piezoelectric element 2 . Piston 82 is connected to guide 83 via disk spring 85 . A base portion 815 is provided inside the housing 81 , and the piezoelectric element 2 is arranged on the base p...

Embodiment 2

[0326] Except that the calcining temperature of the sheet-shaped molded body after degreasing is set to 1105°C, follow the same steps as in Example 1 to produce 0.07 (K 0.45 Na 0.55 ) 0.93}{Nb 0.82 Ta 0.10 Sb 0.08}O 3 Composition of crystal-oriented ceramics. With regard to the obtained crystal-oriented ceramics, the sintered body density, average orientation degree, and piezoelectric properties were evaluated under the same conditions as in Example 1. In addition, a laminated actuator of 40 piezoelectric elements was manufactured in the same procedure as in Example 1, and the characteristics of the actuator were evaluated.

[0327] The relative density of the crystal-oriented ceramics obtained in this embodiment is above 95%. In addition, the pseudo-cubic {100} planes are oriented parallel to the tape planes, and the average degree of orientation of the pseudo-cubic {100} planes measured by the Lautergelding method is 94.6%. Also, as a result of the evaluation of the...

Embodiment 3

[0342] Except that the calcining temperature of the sheet-shaped molded body after degreasing is set to 1105°C, follow the same steps as in Example 1 to produce 0.065 (K 0.45 Na 0.55 ) 0.935}{Nb 0.83 Ta 0.09 Sb 0.08}O 3 Composition of crystal-oriented ceramics. With regard to the obtained crystal-oriented ceramics, the sintered body density, average orientation degree, and piezoelectric properties were evaluated under the same conditions as in Example 1. In addition, a laminated actuator of 40 piezoelectric elements was produced in the same procedure as in Example 1, and the characteristics of the actuator were evaluated.

[0343] The relative density of the crystal-oriented ceramics obtained in this embodiment is above 95%. In addition, the pseudo-cubic {100} planes were oriented parallel to the tape planes, and the average degree of orientation of the pseudo-cubic {100} planes measured by the Lautergelding method was 93.9%. In addition, as a result of the evaluation...

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Abstract

A piezoelectric actuator (1) comprising a piezoelectric element (2) having a pair of electrodes formed on the surface of a piezoelectric ceramic as a drive source. The piezoelectric actuator (1) satisfies at least one of following requirements (a) to (c). (a) Variation width WC of apparent dynamic capacitance C (F) due to temperature variation falls within +-11% in a specific temperature range of -30 to 80 DEG C. (b) Variation width WL of displacement L (mum) due to temperature variation falls within +-14% in a specific temperature range of -30 to 80 DEG C. (c) Variation width WL/C of L/C due to temperature variation falls within +-12% in a specific temperature range of -30 to 80 DEG C, assuming that the apparent dynamic capacitance is C (F) and the displacement is L (mum).

Description

technical field [0001] The present invention relates to laminated actuators, piezoelectric transformers, ultrasonic motors, bimorph piezoelectric elements, ultrasonic sonar, piezoelectric ultrasonic vibrators, piezoelectric Piezoelectric actuators for buzzers, piezoelectric speakers, etc. Background technique [0002] Piezoelectric actuators using piezoelectric ceramic materials are products that convert electrical energy into mechanical energy by using the displacement caused by the reverse piezoelectric effect, and are widely used in the fields of electronics and electromechanics. [0003] Pb(Zr·Ti)O 3 system (hereinafter referred to as "PZT system"), BaTiO 3 Wait. PZT-based piezoelectric ceramics have higher piezoelectric characteristics than other piezoelectric ceramics, and account for most of the piezoelectric ceramics that have been put into practical use. However, since lead oxide (PbO) with a high vapor pressure is contained, there is a problem that the load on ...

Claims

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Application Information

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IPC IPC(8): H01L41/09H01L41/187H01L41/24H01L41/22C04B35/00H02N2/00
Inventor 长屋年厚野野山龙彦中村雅也斋藤康善高尾尚史本间隆彦鹰取一雅
Owner DENSO CORP
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