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Wireless receiving microelectronic mechanical microwave power sensor and manufacturing method therefor

A micro-electronic machinery and microwave power technology, applied in the direction of electromagnetic field characteristics, etc., can solve the problem of not being able to directly receive microwave power, and achieve the effect of broadening the microwave measurement frequency band, reducing return loss, and achieving impedance matching.

Inactive Publication Date: 2007-09-12
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional power meters use waveguide power sensors, bismuth-antimony as thermocouples, and microwave transmission lines such as coaxial cables as microwave signal input and connection devices, which cannot directly receive microwave power.

Method used

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  • Wireless receiving microelectronic mechanical microwave power sensor and manufacturing method therefor
  • Wireless receiving microelectronic mechanical microwave power sensor and manufacturing method therefor
  • Wireless receiving microelectronic mechanical microwave power sensor and manufacturing method therefor

Examples

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Embodiment Construction

[0031] specific implementation plan

[0032] The sensor uses gallium arsenide as the substrate 8, on the gallium arsenide substrate 8 there is a layer of AlGaAs thin film 9, on the AlGaAs thin film 9 there is a layer of coplanar waveguide antenna 1, and a section of the antenna is etched away The U-shaped slot 3 has a parasitic element patch 2 on both sides of the antenna, the end of the coplanar waveguide antenna 1 is connected to the coplanar waveguide transmission line 4, and there are two parallel load resistors at the end of the coplanar waveguide transmission line 4, and the load resistor 5 The outer side of the thermopile is correspondingly provided with a thermopile 7, and the two ends of the thermopile 7 are connected to the two pressure welding blocks 6 through wires. The present invention receives the microwave signal from the outside through the special structure coplanar waveguide antenna at the front end, and then transmits the microwave signal to the terminal th...

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Abstract

This invention relates to a wireless receiving type, microelectron mechanical, and microwave power level sensor and its preparation method. The invention uses coplane radiating guide (1) to take over microwave power to create resistance heating, through thermocouple to measure microwave signal amplitude. This sensor forms coplane radiating guide on gaas substrate (8). coplane radiating guide then connect with coplane waveguide transmission line(4) to transmit microwave signal. The terminal of coplane waveguide transmission line(4) has two parallel resistance as microwave load resistance(5). Load resistance through heating creates its right side thermopile (7) to heat. Thermopile (7) owing to exothermic disproportionation cause cold and hot point, form temperature variation. This temperature difference owing to seebeck effect creates constant voltage at two output port of thermopile and ouput by two pressure welding piece (6). The ratio between this output thermo voltage and input microwave efficiency is direct ratio, so measuring this volatge could obtain numerical value of microwave power.

Description

technical field [0001] The present invention utilizes the coplanar waveguide antenna with the parasitic unit patch and the U-shaped slot to receive the microwave power, transmits the microwave power to the terminal resistance through the coplanar waveguide, uses the thermopile to measure the calorific value of the resistance and converts it into thermoelectric potential output, thereby The invention realizes the measurement of microwave power and belongs to the field of micro-electro-mechanical systems. Background technique [0002] In microwave research, microwave power is an important parameter to characterize microwave signal characteristics. In microwave wireless application and measurement technology, the detection of microwave power is a very important part. Traditional power meters use waveguide power sensors, bismuth-antimony as thermocouples, and microwave transmission lines such as coaxial cables as microwave signal input and connection devices, which cannot direc...

Claims

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Application Information

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IPC IPC(8): G01R29/08
Inventor 廖小平田涛
Owner SOUTHEAST UNIV
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