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Wireless receiving microelectronic mechanical microwave power sensor and manufacturing method therefor

A micro-electromechanical and microwave power technology, applied in the direction of electromagnetic field characteristics, can solve the problems that microwave power cannot be directly received, and achieve the effects of widening the microwave measurement frequency band, reducing return loss, and realizing impedance matching

Inactive Publication Date: 2009-07-08
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional power meters use waveguide power sensors, bismuth-antimony as thermocouples, and microwave transmission lines such as coaxial cables as microwave signal input and connection devices, which cannot directly receive microwave power.

Method used

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  • Wireless receiving microelectronic mechanical microwave power sensor and manufacturing method therefor
  • Wireless receiving microelectronic mechanical microwave power sensor and manufacturing method therefor
  • Wireless receiving microelectronic mechanical microwave power sensor and manufacturing method therefor

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Embodiment Construction

[0031] specific implementation plan

[0032] The sensor uses gallium arsenide as the substrate 8, on the gallium arsenide substrate 8 there is a layer of AlGaAs thin film 9, on the AlGaAs thin film 9 there is a layer of coplanar waveguide antenna 1, and a section of the antenna is etched away The U-shaped slot 3 has a parasitic element patch 2 on both sides of the antenna, the end of the coplanar waveguide antenna 1 is connected to the coplanar waveguide transmission line 4, and there are two parallel load resistors at the end of the coplanar waveguide transmission line 4, and the load resistor 5 The outer side of the thermopile is correspondingly provided with a thermopile 7, and the two ends of the thermopile 7 are connected to the two pressure welding blocks 6 through wires. The present invention receives the microwave signal from the outside through the special structure coplanar waveguide antenna at the front end, and then transmits the microwave signal to the terminal th...

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Abstract

The wireless receiving microelectromechanical microwave power sensor and its preparation method are a kind of sensor and its preparation method which use a coplanar waveguide antenna (1) to receive microwave power to cause resistance heating, and measure the microwave signal amplitude through a thermocouple. The sensor forms a coplanar waveguide antenna (1) on a gallium arsenide substrate (8), and the coplanar waveguide antenna (1) is connected to a coplanar waveguide transmission line (4) to transmit microwave signals, and the coplanar waveguide transmission line ( 4) There are two resistors connected in parallel at the terminal as the microwave load resistor (5), and the load resistor (5) causes heating of the thermopile (7) at the right end by heating, and the thermopile (7) generates heat and cold due to uneven heating node, forming a temperature difference, the temperature difference is due to the Seebeck effect at the two output terminals of the thermopile to generate a DC voltage output by the two pressure welding blocks (6), and the output thermal voltage is proportional to the input microwave power to be measured, measured From this voltage, the value of the microwave power can be obtained.

Description

technical field [0001] The present invention utilizes the coplanar waveguide antenna with the parasitic unit patch and the U-shaped slot to receive the microwave power, transmits the microwave power to the terminal resistance through the coplanar waveguide, uses the thermopile to measure the calorific value of the resistance and converts it into thermoelectric potential output, thereby The invention realizes the measurement of microwave power and belongs to the field of micro-electro-mechanical systems. Background technique [0002] In microwave research, microwave power is an important parameter to characterize microwave signal characteristics. In microwave wireless application and measurement technology, the detection of microwave power is a very important part. Traditional power meters use waveguide power sensors, bismuth-antimony as thermocouples, and microwave transmission lines such as coaxial cables as microwave signal input and connection devices, which cannot direc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R29/08
Inventor 廖小平田涛
Owner SOUTHEAST UNIV
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