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Air bearing

A technology of air bearings and supporting parts, applied in bearings, shafts and bearings, bearings for linear motion, etc., can solve the problems of inconvenient manufacturing of porous throttling air bearings and limited application range, and achieve vibration or shock attenuation If the time is too long, the structure is easy to process, and the effect of increasing processing difficulty and time

Inactive Publication Date: 2007-09-26
TSINGHUA UNIV
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Problems solved by technology

Huazhong University of Science and Technology has studied the method of increasing damping through porous throttling, but the inconvenient manufacture of porous throttling air bearings leads to a limited range of applications. At present, foreign advanced ultra-precision air bearing motion platforms basically use small hole throttling and surface throttling

Method used

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Embodiment Construction

[0015] The working principle, structure and specific implementation methods of the present invention will be further described below in conjunction with the accompanying drawings.

[0016] Fig. 2 is a schematic structural view of the air bearing provided by the present invention, the air bearing includes an air bearing body 2, an annular groove 7 and an orifice 8 communicating with the annular groove are arranged on the upper part of the air bearing body, and in the orifice A throttling plug 9 is arranged inside, an upper chamber 4 is arranged at the center of the upper part of the air bearing body 2 , a lower chamber 6 is arranged at the center of the lower part, and a damping hole 5 is arranged between the upper chamber 4 and the lower chamber 6 . The upper part of the air bearing body is fixedly connected with the lower part of the supported part, and there is an air gap between the lower part of the air bearing body and the bearing seat, forming a double-chamber structure s...

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Abstract

It relates to an air bearing used for the super fine air flow movement system and coordinate measuring machine's movement parts. It features in the up cavity chamber, a lower cavity chamber and resistance formed air analog spring dual cavity structure designed in the middle of the air bearing to improve the resistance ability of the air bearing, to get over the long shock lessening period, unstable system, providing a highly stable air bearing, reducing outside vibrating force, shock and air bearing inherent micro vibration for the static and dynamic harm to overall movement system.

Description

technical field [0001] The invention relates to an air bearing, which is mainly used for the design of moving parts in an ultra-precision air-floating motion system and three-coordinate measuring equipment, and belongs to the technical field of ultra-precision equipment and measurement. Background technique [0002] Air bearing is the key component of ultra-precision air bearing motion system and three-coordinate measuring machine. It has many advantages such as high rigidity, cleanliness and no friction, but it also has the disadvantage of poor stability, which is the main factor restricting its stability. One is its weak damping capacity. [0003] In the existing air bearing structure (see Figure 1), the air flow is unidirectional, and the damping mainly comes from the tiny energy consumed by the turbulent flow at the orifice, resulting in weak damping performance. If vibration or impact that has occurred needs to be attenuated, damping If it is too small, it will cause t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16C29/02F16C32/06
Inventor 朱煜徐登峰张鸣闵伟
Owner TSINGHUA UNIV
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