Laser oscillator

A laser oscillator and laser technology, applied in the direction of lasers, laser components, phonon exciters, etc., can solve the problems of reduced cooling performance, poor heat transfer performance, and poor flatness of reflecting surfaces, etc., to achieve the goal of improving cooling performance Effect

Active Publication Date: 2007-10-03
MITSUBISHI ELECTRIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this way, the heat transfer performance between the mirror and the pressure plate is poor, and the cooling performance is reduced
In order to improve the heat transfer performance, when the pressing force of the pressing plate on the reflector

Method used

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  • Laser oscillator
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Experimental program
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Effect test

Embodiment approach 1

[0021] FIG. 1 is a structural diagram of a mirror mounting portion of a laser oscillator according to Embodiment 1 of the present invention. Fig. 2 is an A-A sectional view of the mirror mounting portion shown in Fig. 1 . The holder 2 is not shown in FIG. 1 . In Fig. 1 and Fig. 2, the mirror 1 is circular and reflects the laser light oscillating inside the laser oscillator. By adjusting the orientation of the reflection surface of the mirror 1, the optical axis of the laser can be adjusted. The mirror 1 is inserted into and held in a concave portion of a holder 2 serving as a mirror holding portion. Of the two planes of the reflecting mirror 1 , the surface on which the laser light is reflected is the reflecting surface (the surface in contact with the plate spring 3 ). The thickness of the reflector 1 is greater than the depth of the concave portion of the holder 2 , so that a step is formed between the reflective surface of the reflector 1 and the mounting surface of the ...

Embodiment approach 2

[0044] 4 is a structural diagram of a mirror mounting portion of a laser oscillator according to Embodiment 2 of the present invention. Fig. 5 is a B-B sectional view of the mirror mounting portion shown in Fig. 4 . The holder 2 is not shown in FIG. 4 . The difference between FIGS. 4 and 5 and Embodiment 1 is that the mirror mounting part presses the mirror 1 against the holder 2 by the coil spring 12 through the mirror pressing plate 11 . In Fig. 4 and Fig. 5, the same symbols as those in Fig. 1 and Fig. 2 represent the same or corresponding parts, which are common throughout the specification. In addition, the forms of the constituent elements described in the specification are only For example, the present invention is not limited to these descriptions.

[0045] The reflector 1 is mounted on the holder 2 by the urging force of the coil spring 12 through the reflector pressure plate 11 . That is, the coil spring 12 pushes the mirror 1 through the mirror pressing plate 11 ...

Embodiment approach 3

[0051] 6 is a structural diagram of a mirror mounting portion of a laser oscillator according to Embodiment 3 of the present invention. Fig. 7 is a C-C sectional view of the mirror mounting portion shown in Fig. 6 . The holder 14 is not shown in FIG. 6 . 6 and 7 are different from Embodiment 2 in that protrusions are provided on the holder 14 and the mirror holding plate 15 .

[0052] The reflector 1 is mounted on the holding seat 14 by the urging force of the coil spring 16 through the reflector pressing plate 15 , and the reflecting mirror pressing plate 15 is provided with a protrusion 15 a protruding toward the reflecting mirror 1 side. The coil spring 16 is an elastic member that presses and fixes the reflector 1 to the holder 14 from the reflective surface side. The mirror holding plate 15 is composed of an annular portion that presses the mirror 1 , and portions protruding radially outward at three locations fixed to the holder 14 by coil springs 16 and screws 17 . T...

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Abstract

To obtain a laser oscillator which can carry out attachment of a mirror such that the deformation amount of the mirror is settled in an allowable range, without requiring high processing accuracy of a contact surface with the mirror in a mirror holding part. The laser oscillator comprises: a circular mirror 1 for reflecting laser beam; a holder 2 for holding the mirror; and a coil spring 16 which is elastic member for fixing it by pressing the mirror 1 to the holder 2 from the reflecting surface side. The coil spring 16 forces the mirror 1 to be fixed by pressing force F which is derived from a formula on the basis of the mass of the mirror 1, thickness, radius, modulus of longitudinal elasticity as well as friction coefficient between the mirror 1 and the holder 2, wavelength and gravitational acceleration of laser beam.

Description

technical field [0001] The present invention relates to a mounting structure of a mirror for reflecting laser light in a laser oscillator. Background technique [0002] In a conventional laser oscillator, a mirror for reflecting laser light is provided inside the laser oscillator. The reflective surface of this mirror is required to have a high flatness corresponding to 1 / 20 or less of the wavelength of the laser light in order to control the wave aberration of the laser light within an allowable range. In addition, since the reflector absorbs part of the laser light, it is necessary to cool the reflector in order to dissipate heat. For laser oscillators for processing, the laser light inside the laser oscillator has high output and high light intensity. Therefore, high cooling performance is required for the mirror holder that holds the mirror. [0003] For this reason, when mounting the reflector so that the reflective surface side of the reflector is in contact with th...

Claims

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Application Information

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IPC IPC(8): G02B7/182G02B7/198B23K26/00H01S3/00H01S3/08
CPCG02B7/1821G02B7/1825
Inventor 船冈幸治川上学长谷川正彦玉谷基亮西田聪
Owner MITSUBISHI ELECTRIC CORP
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