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Soft magnetic target material

A soft magnetic, target technology, applied in magnetic recording, metal material coating process, ion implantation plating, etc., can solve the problems of magnetron sputtering, poor sputtering, film quality deterioration, etc.

Inactive Publication Date: 2007-10-17
SANYO SPECIAL STEEL COMPANY
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  • Abstract
  • Description
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Problems solved by technology

[0007] However, the limit of the thickness of the above-mentioned target product is about 5 mm. If the thickness exceeds this limit, sufficient leakage magnetic flux does not appear on the surface of the target, so there is a problem that normal magnetron sputtering cannot be performed.
In addition, as the film of the target material used for magnetron sputtering, since a high magnetic flux density is required, an Fe-based material is preferred, but there is a problem in corrosion resistance at this time, and because the target Oxidation of the material, the quality of the film will deteriorate, and abnormal discharge will occur in the oxidized part during sputtering, resulting in poor sputtering

Method used

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Embodiment

[0019] The present invention will be specifically described by way of examples below.

[0020] As shown in Table 1, Fe—Co-based alloys or Fe—Ni-based alloys were produced by a gas-atomizing method or a casting method. The gas atomization method is carried out under the conditions that the gas type is argon, the diameter of the nozzle is 6 mm, and the air pressure is 5 MPa. On the other hand, the casting method is performed by melting in a ceramic crucible (φ200×30L), and then pulverizing it into powder. The powders produced in this way were classified to a diameter of 500 μm or less, and each powder was stirred for 1 hour with a V-type mixer.

[0021] Each powder produced in this way is not filled into a sealing tank made of SC material with a diameter of 200mm and a height of 100mm, and after reaching a vacuum degree of 10 -1 After degassing and vacuum sealing at Pa or higher, a molded body was produced by HIP (hot isostatic pressing) at a temperature of 1173K, a pressure o...

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Abstract

There is disclosed a soft magnetic target material with an improved atmospheric resistance without deterioration of magnetic properties. A soft magnetic target material according to the first aspect comprises a Fe-Co based alloy having a Fe:Co atomic ratio of 100:0 to 20:80, wherein the alloy further comprises one or both of Al and Cr of 0.2 to 5 atom %. In addition, a soft magnetic target material according to the second aspect comprises a Fe-Ni based alloy having a Fe:Ni atomic ratio of 100:0 to 20:80, wherein the alloy further comprises one or both of Al and Cr of 0.2 to 5 atom %. In the soft magnetic target materials according to the first and second aspects, the alloys further comprise one or more selected from a group consisting of B, Nb, Zr, Ta, Hf, Ti and V of not more than 30 atom %.

Description

[0001] Reference is made here to Japanese Patent Application No. 2006-112504 filed on April 14, 2006, the entire disclosure content of which is hereby incorporated by reference in the disclosure content of this specification. technical field [0002] The invention relates to a Fe-Co or Fe-Ni target used for forming a soft magnetic thin film by sputtering. Background technique [0003] In recent years, the progress of the magnetic recording technology has been remarkable, and the increase of the recording density of the magnetic recording medium has been promoted in order to increase the capacity of the drive. However, in the in-plane magnetic recording method magnetic recording media widely used in the world today, in order to achieve high recording density, recording bits (bits) need to be miniaturized, and a high coercive force that can hardly be recorded by recording bits is required. Therefore, a perpendicular magnetic recording method has been studied as a method of sol...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/14G11B5/68
CPCG11B5/8404G11B5/667C23C14/3414
Inventor 柳谷彰彦相川芳和
Owner SANYO SPECIAL STEEL COMPANY
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