Cross structure two-D wind speed wind direction sensor and its preparation method

A technology of wind speed, wind direction, and cross, which is applied to instruments, uses thermal variables to measure fluid speed, speed/acceleration/impact measurement, etc. It can solve problems such as unfavorable process and packaging, high power consumption of sensors, and fragile structure, etc., and achieve response time Long, improved sensitivity, simple and reliable process steps

Active Publication Date: 2007-10-24
SOUTHEAST UNIV
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Problems solved by technology

However, due to the high thermal conductivity of the silicon substrate, this type of sensor consumes a lot of power and has low sensitivity
Using the method of back etching or front etching to form a thermal insulation film can improve the sensitivity, but the structure is easily damaged, which is not conducive to the subsequent process and packaging

Method used

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  • Cross structure two-D wind speed wind direction sensor and its preparation method

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Embodiment Construction

[0013] The invention is a two-dimensional wind speed and direction sensor with a cross structure. The sensor adopts a glass substrate, and on the glass substrate, there are a cross structure heating resistor 1, a first temperature measuring resistor 2, a second temperature measuring resistor 3, a third temperature measuring resistor 4, and a fourth temperature measuring resistor 5, which are respectively symmetrical Distributed between the heating resistors 1 of the cross structure; 16 pressure welding blocks symmetrically distributed around the glass substrate respectively lead out the heating resistors and the four temperature measuring resistors. The substrate is made of glass, ceramic or other materials with low thermal conductivity. The four temperature-measuring resistors are platinum, nickel or other metal resistors with high temperature coefficients made by lift-off process.

[0014] When the wind blows through the heating chip, the temperature field around the cross ...

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Abstract

A two-dimension air speed direction sensor in cross structure relates to a two-dimension hot-film air speed direction sensor based on MEMS remove technique, in particular to a hot-film air speed direction sensor which uses non-siliceous material as glass and ceramic to prepare liner. The sensor uses a glass liner and a heating resistance (1) at center as a cross structure, wherein a first temperature sensing resistance (2), a second temperature sensing resistance (3), a third temperature sensing resistance (4), and a fourth temperature sensing resistance (5) are symmetry distributed between the heating resistance as cross structure. Via measuring the temperature difference of two-to-two temperature sensing resistances, the invention can obtain the air speed and direction. The sensor has simple production, high sensitivity, low power consumption and high response speed.

Description

technical field [0001] The invention relates to a two-dimensional hot-film wind speed and direction sensor based on a micromechanical (MEMS) stripping process, in particular to a hot-film wind speed sensor prepared by using non-silicon materials such as glass and ceramics as a substrate. Background technique [0002] Wind speed and wind direction are very important components in meteorological measurement. As we all know, although wind cups and wind vanes that use machining can also measure wind speed and wind direction, these mechanical devices are easy to wear due to moving parts, and at the same time have the disadvantages of large volume, high price, and need for frequent maintenance. The micro-flow sensor based on MEMS processing technology has the characteristics of small size, low price and good product consistency, and it has become a hot spot in the research of fluid sensors in recent years. Van Putten proposed the first hot wire flow sensor based on silicon microm...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P5/12G01P13/02
Inventor 秦明沈广平黄庆安
Owner SOUTHEAST UNIV
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