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Preionization igniting device based atmosphere pressure discharging cold plasma generators

A technology of cold plasma and ignition device, applied in the direction of plasma, discharge tube, electrical components, etc., which can solve the problems of high breakdown electric field, limited use of plasma technology, and high cost of rare gases

Active Publication Date: 2007-12-05
TSINGHUA UNIV
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Problems solved by technology

Nitrogen, air and other gases have a high breakdown electric field at atmospheric pressure (air is about 20KV / cm), although the discharge of nitrogen, oxygen, air and other gases can be realized by the induced discharge method in the laboratory, but the induced gas is still It is a rare gas, which makes this technology still unable to get rid of the limitation of expensive rare gases
Due to the high cost of rare gases, this greatly limits the use of existing plasma technologies

Method used

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  • Preionization igniting device based atmosphere pressure discharging cold plasma generators
  • Preionization igniting device based atmosphere pressure discharging cold plasma generators

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Embodiment Construction

[0018] The present invention adopts in the cold plasma generator as shown in Fig. 1, 2, through the pre-ionization effect of the third electrode to the working gas, seed electrons are provided for the formation of discharge between the radio frequency electrode and the ground electrode, thereby realizing the When the voltage is relatively large and the breakdown voltage is low, the direct breakdown discharge of nitrogen, air, oxygen and other gases that are difficult to break down directly under the original atmospheric pressure can be directly realized. The third pole can adopt a floating potential or connect to a high-voltage power supply, both of which can achieve the purpose of pre-ionization of the working gas.

[0019] Figure 1 is a schematic diagram of a flat-panel plasma generator with a pre-ionization ignition device. Wherein, 1 is a radio frequency electrode, 2 is a ground electrode, 3 is a third electrode for pre-ionization, and 4 is an insulating material separatin...

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Abstract

An air pressure discharging non-thermal plasma generator based on pre-ionization ignition device has its characters: the said pre-ionization ignition device, added into the said generator, locates on the third metal pole between two plate poles or inside and outside poles, thus the said plate or coaxial air pressure discharging non-thermal plasma generator is structured. The said pre-ionization ignition device can achieve the direct breakdown of nitrogen, air and oxygen in a lower breakdown voltage, and the stable discharge. The cost of working gas of air pressure discharging non-thermal plasma generator is greatly reduced as well.

Description

technical field [0001] The invention relates to the technical field of atmospheric pressure discharge cold plasma generators. Background technique [0002] At present, a large area of ​​non-equilibrium cold plasma can be generated under low pressure conditions, but the existence of the vacuum chamber, on the one hand, greatly increases the manufacturing and maintenance costs of the equipment, on the other hand, it also limits the geometric size of the workpiece to be processed, thus This greatly limits its scope of application. At present, there are two types of plasma that can be generated under atmospheric pressure conditions. One is thermal plasma, which is characterized by high gas temperature, about 10,000K, and is mainly used for plasma spraying, cutting, welding, waste treatment, materials, etc. Surface processing and other fields. Due to the high temperature of hot plasma, it cannot be used for processing materials that are afraid of heat; the other is cold plasma,...

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Application Information

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IPC IPC(8): H05H1/46H05H1/24H01J37/32
Inventor 李和平包成玉孙文廷李果田喆王森
Owner TSINGHUA UNIV
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