Fan filter unit

A filter and fan technology, applied in the direction of machine/engine, ventilation system, mechanical equipment, etc., can solve the problem of inconsistent speed
CN101107482AActive Publication Date: 2008-01-16PANASONIC CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
PANASONIC CORP
Publication Date
2008-01-16

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Abstract

A fan filter unit comprises a plurality of fan motors, a plurality of detecting sections, a body control section, and a filter. Each fan motor includes a fan and a motor. The body control section performs feedback control of each fan motor so that its detection rotation speed coincides with a set rotation speed based on a rotation speed detected at the detecting section. When a rotation speed detection value at any detecting section is smaller than that at other detecting sections, rotation speed synchronization control is carried out for matching the rotation speed of other fan motors to that of the fan motor of slow rotation speed.
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Description

technical field

[0001] The present invention relates to a fan filter unit used in a clean room or the like requiring a clean space for manufacturing semiconductors, liquid crystals, plasma display panels, and the like. Background technique

[0002] For the fan filter unit, it is required to be thin, the area of ​​the clean air outlet should be large, and the ability to supply a uniform and sufficient air volume is required. Therefore, multiple fan motors are used. However, buzzing sounds may be generated when multiple fan motors are used.

[0003] As a method of suppressing generation of humming sound, for example, Japanese Patent Laid-Open No. 2004-205095 discloses a technique of precisely controlling the rotation speeds (hereinafter referred to as rotation speeds) of a plurality of electric motors per unit time.

[0004] In the fan filter unit with a plurality of fan motors, in the control of the existing technology for suppressing buzzing, the speed of the second fan mo...

Claims

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