Phase noise compensation for interferometric absolute distance measuring
A technology of absolute distance and distance, applied in the field of computer program products, capable of solving complex problems
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[0073] Figure 1 shows the basic measurement configuration. Signal source SQ is coupled in via optical connectors OV1-OV4 to measuring interferometer MI, reference interferometer RI and optional component calibration unit KE. The target ZI to be measured is an integral part of the measurement interferometer in the measurement. Via optical paths OS2, OS3 and OS4, the signals are transmitted to detector units D2, D3 and D4. The detector signals are sent to the signal processor SP via cables L2, L3 and L4. The signal processor SP is responsible for processing and analyzing the signal and also controls the signal source SQ via the control line SL.
[0074] Figure 2 shows a schematic diagram of an interferometer used to form a heterodyne mixing product. Part of the emitted light is coupled out by the beam splitter 1 , reflected on the reflector 2 and passed through the beam splitter, and superimposed with the light signal scattered back from the reflector 3 . For interferometric...
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